Abstract: A method of producing a diffraction grating of borosilicate glass or barium borosilicate glass, the method comprising the steps of forming a grating on a surface of a silicon wafer the grating through the Bosch process; forming an oxide film on a surface of the grating by heating and exposure to water vapor of the silicon wafer; removing the oxide film using hydrofluoric acid; making the surface provided with the grating of the silicon wafer and a surface of a glass plate undergo anodic bonding; heating the silicon wafer and the glass plate bonded to each other; polishing a surface opposite to the boded surface of the silicon wafer and a surface opposite to the boded surface of the glass plate; and removing silicon from the glass plate by selective etching using xenon difluoride.

Abstract: A diffusion element is configured by combining: a structure for diffusion constituted by combining periodic surface structures having multiple periods to achieve a light intensity distribution in which the light intensity is uniform at angles less than or equal to a predetermined diffusion angle ? and the light intensity is as close as possible to zero intensity at angles greater than the diffusion angle ?; and a diffractive structure having a period of 1 or more and 2 or less times of ?max, where ?max is the maximum period of the structure for diffusion.

Abstract: A diffusion element is configured by combining: a structure for diffusion constituted by combining periodic surface structures having multiple periods to achieve a light intensity distribution in which the light intensity is uniform at angles less than or equal to a predetermined diffusion angle ? and the light intensity is as close as possible to zero intensity at angles greater than the diffusion angle ?; and a diffractive structure having a period of 1 or more and 2 or less times of ?max, where ?max is the maximum period of the structure for diffusion.

Abstract: A diffuser is provided with a recess-protrusion structure formed on a plane. When a z-axis is defined as a normal to the plane, an x-axis is defined on the plane, the x-axis is divided into plural intervals, Snx represents length of an interval nx, Sx-max and Sx-min represent the maximum and the minimum of Snx, respectively, the relationship 2<Sx-max/Sx-min holds, Snx varies on a random basis between Sx-min and Sx-max, in an xz cross section, a recess portion and a protrusion portion are formed on each of adjacent intervals along the x-axis, respectively, and when dznx represents a difference between the maximum and the minimum of z coordinate of the recess-protrusion structure in the interval nx in the xz cross section, Anx represents a ratio between dznx and Snx, Anx-max and Anx-min represent the maximum and the minimum of Anx, the relationship Ax-max/Ax-min<1.3 holds.

Abstract: A diffuser is provided with a recess-protrusion structure formed on a plane. When a z-axis is defined as a normal to the plane, an x-axis is defined on the plane, the x-axis is divided into plural intervals, Snx represents length of an interval nx, Sx-max and Sx-min represent the maximum and the minimum of Snx, respectively, the relationship 2<Sx-max/Sx-min holds, Snx varies on a random basis between Sx-min and Sx-max, in an xz cross section, a recess portion and a protrusion portion are formed on each of adjacent intervals along the x-axis, respectively, and when dznx represents a difference between the maximum and the minimum of z coordinate of the recess-protrusion structure in the interval nx in the xz cross section, Anx represents a ratio between dznx and Snx, Anx-max and Anx-min represent the maximum and the minimum of Anx, the relationship Ax-max/Ax-min<1.3 holds.

Abstract: A light receiving layer is formed with an array of photodiodes for accumulating signal charge produced by photoelectric conversion of incident light. A wiring layer provided with electrodes and wiring for controlling the photodiodes is formed behind the light receiving layer in a traveling direction of the incident light. In the light receiving layer, there is formed a projection and depression structure in which a pair of inclined surfaces have symmetric inclination directions and each inclined surface corresponds to each photodiode. Each inclined surface makes the incident light enter each photodiode by a light amount corresponding to an incident angle.

Abstract: A light receiving layer is formed with an array of photodiodes for accumulating signal charge produced by photoelectric conversion of incident light. A wiring layer provided with electrodes and wiring for controlling the photodiodes is formed behind the light receiving layer in a traveling direction of the incident light. In the light receiving layer, there is formed a projection and depression structure in which a pair of inclined surfaces have symmetric inclination directions and each inclined surface corresponds to each photodiode. Each inclined surface makes the incident light enter each photodiode by a light amount corresponding to an incident angle.

Abstract: A light receiving layer is formed with an array of photodiodes for accumulating signal charge produced by photoelectric conversion of incident light. A wiring layer provided with electrodes and wiring for controlling the photodiodes is formed behind the light receiving layer in a traveling direction of the incident light. In the light receiving layer, there is formed a projection and depression structure in which a pair of inclined surfaces have symmetric inclination directions and each inclined surface corresponds to each photodiode. Each inclined surface makes the incident light enter each photodiode by a light amount corresponding to an incident angle.

Abstract: A light receiving layer is formed with an array of photodiodes for accumulating signal charge produced by photoelectric conversion of incident light. A wiring layer provided with electrodes and wiring for controlling the photodiodes is formed behind the light receiving layer in a traveling direction of the incident light. In the light receiving layer, there is formed a projection and depression structure in which a pair of inclined surfaces have symmetric inclination directions and each inclined surface corresponds to each photodiode. Each inclined surface makes the incident light enter each photodiode by a light amount corresponding to an incident angle.