Patents by Inventor Makio Suita

Makio Suita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mark position detecting method and device for aligner and aligner having the device
    Patent number: 5400145
    Abstract: Regarding a reflected light from any line portion, which is parallel to the longitudinal direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 33 functions merely as a glass plate, while the cylindrical lens 34 converges the light onto a pixel on the line sensor 35a, performing optical integration and simplifying image processing. Regarding a reflected light from any line portion, which is parallel to the lateral direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 34 functions merely as a glass plate, while the cylindrical lens 33 magnifies and forms a line image on the line sensor 35a along the pixel row of that. A toroidal lens can be used in place of the cylindrical lenses 33 and 34.
    Type: Grant
    Filed: March 17, 1993
    Date of Patent: March 21, 1995
    Assignee: Fujitsu Limited
    Inventors: Makio Suita, Hironobu Kitajima, Masaki Yamabe