Abstract: Method of evaluating precision of output data using error propagation includes performing numerical differentiation using input data in data processing, and thereby obtaining a Jacobian matrix J of the data processing; estimating variance-covariance of errors of the input data, and thereby obtaining an error matrix D of the input data; and calculating an error matrix from the Jacobian matrix J and the error matrix D of the input data, the error matrix R representing variance-covariance of errors of output data.

Abstract: Method of evaluating precision of output data using error propagation includes performing numerical differentiation using input data in data processing, and thereby obtaining a Jacobian matrix J of the data processing; estimating variance-covariance of errors of the input data, and thereby obtaining an error matrix D of the input data; and calculating an error matrix from the Jacobian matrix J and the error matrix D of the input data, the error matrix R representing variance-covariance of errors of output data.

Abstract: A two-dimensional lattice calibrating device includes: a measuring unit that measures respective positions of marks for each of a plurality of measurement dispositions; a simultaneous-equations generating unit that generates simultaneous equations for acquiring deviations of the plurality of marks using a coordinate relational equation and a least-squares conditional equation that sets least-squares lines that minimize the deviation of actual position of the marks based on measurement values as coordinate axes of artifact coordinates; and a simultaneous-equations calculating unit that solves the derived simultaneous equations.

Abstract: An optical axis polarization type laser interferometer including a reference sphere which forms a reference of measurement, a retro-reflecting means disposed at a measurement object, a laser interference measuring apparatus for outputting a measurement value corresponding to an increase or a decrease in the distance to and from the retro-reflecting means; and a two-axis turning mechanism for turning an emission beam of the corresponding laser interference measuring apparatus centering around the reference sphere, which measures, with the center coordinates of the reference sphere used as the reference, the distance to and from the retro-reflecting means where the optical axes of the emission beam from the laser interference measuring apparatus mounted on the two-axis turning mechanism and a return beam become parallel to each other, wherein the fixing portion of the first axis turning mechanism installed at the base part of the apparatus is disposed at the inner circumference thereof, the reference sphere is

Abstract: A method for estimating an absolute distance between a tracking laser interferometer and a retroreflector is provided. The tracking laser interferometer includes the retroreflector for reflecting and returning an incident measurement light in an incident direction and a two-axis rotating mechanism for rotationally moving in an exit direction of the measurement light so that optical axes of the measurement light and return light are collimated.

Abstract: The present invention provides a form measuring device comprising a measuring section (302) for obtaining measurement data obtained by measuring a space between a straightedge rule (321) and an edge of an object to be measured (305) paired with each other, a function value setting section for setting form-function values, which indicates distances from a reference line R to the straightedge rule (321) and to edges of the object to be measured, and angle-function values ?, which indicates internal angles of the object to be measured 305 and an angle formed by the straightedge rules (321), a simultaneous equation deriving section for deriving simultaneous equations for pairs each consisting of the straightedge rule (321) and an edge of the object to be measured (305) based on the measurement data, and a simultaneous equation processing section for processing the derived simultaneous equations.

Abstract: A two-dimensional lattice calibrating device includes: a measuring unit that measures respective positions of marks for each of a plurality of measurement dispositions; a simultaneous-equations generating unit that generates simultaneous equations for acquiring deviations of the plurality of marks using a coordinate relational equation and a least-squares conditional equation that sets least-squares lines that minimize the deviation of actual position of the marks based on measurement values as coordinate axes of artifact coordinates; and a simultaneous-equations calculating unit that solves the derived simultaneous equations.

Abstract: An optical axis polarization type laser interferometer including a reference sphere which forms a reference of measurement, a retro-reflecting means disposed at a measurement object, a laser interference measuring apparatus for outputting a measurement value corresponding to an increase or a decrease in the distance to and from the retro-reflecting means; and a two-axis turning mechanism for turning an emission beam of the corresponding laser interference measuring apparatus centering around the reference sphere, which measures, with the center coordinates of the reference sphere used as the reference, the distance to and from the retro-reflecting means where the optical axes of the emission beam from the laser interference measuring apparatus mounted on the two-axis turning mechanism and a return beam become parallel to each other, wherein the fixing portion of the first axis turning mechanism installed at the base part of the apparatus is disposed at the inner circumference thereof, the reference sphere is

Abstract: An optical-axis deflection type laser interferometer includes a reference ball serving as a measurement reference, a retroreflecting means disposed at an object to be measured, a laser interferometer length measuring apparatus outputting a measurement value between the apparatus and the retroreflecting means, and a rotational mechanism that rotates a beam projected from the laser interferometer length measuring apparatus around the reference ball. The laser interferometer additionally includes a displacement gauge that measures an error caused by a relative motion between the reference ball and the laser interferometer length measuring apparatus, and a rectilinear movement mechanism that displaces these in a direction of an optical axis of a measurement beam with respect to the reference ball while maintaining a relative positional relationship between the laser interferometer length measuring apparatus and the displacement gauge.

Abstract: An optical-axis deflection type laser interferometer includes a reference ball serving as a measurement reference, a retroreflecting means disposed at an object to be measured, a laser interferometer length measuring apparatus that outputs a measurement value according to an increase or a decrease in distance between the apparatus and the retroreflecting means, and a rotational mechanism that rotates a beam projected from the laser interferometer length measuring apparatus around the reference ball. The thus structured laser interferometer measures a distance between the laser interferometer and the retroreflecting means that makes an optical axis of an outgoing beam projected from the laser interferometer length measuring apparatus mounted on the rotational mechanism and an optical axis of a return beam returned to the laser interferometer length measuring apparatus parallel to each other, based on center coordinates of the reference ball.

Abstract: To provide a method for estimating an absolute distance L between a tracking laser interferometer and a retroreflector 70, the tracking laser interferometer including; the retroreflector 70 for reflecting and returning incident measurement light A in an incident direction; and a two-axis rotating mechanism 40 for rotationally moving in an exit direction of the measurement light A so that optical axes of the measurement light A and return light B are collimated, which outputs a measurement value according to an increase or decrease in the distance between the interferometer and the retroreflector 70, wherein the absolute distance L between the interferometer and the retroreflector 70 is estimated by performing arithmetic operation based on an angular position variation ?2 of the two-axis rotating mechanism 40 when a deviation amount d of the return light B from the retroreflector 70 relative to a predetermined position is given as a predetermined value d2.

Abstract: Measured values obtained in a measuring machine to be estimated are provided to estimate errors in the measured values. Based on the estimated errors in the measured values, a covariance matrix or correlation matrix of measured values is derived. The covariance matrix or correlation matrix is then subjected to eigenvalue decomposition to derive eigenvalues and eigenvectors. A normal random number with an expected value of 0 and a variance equal to an eigenvalue corresponding to the eigenvalue is generated as a coefficient of coupling for each eigenvector, and all eigenvectors are linearly coupled to generate pseudo-measured values of the measuring machine. The generated pseudo-measured values are subjected to statistic processing to estimate uncertainty of the measuring machine.

Abstract: The present invention provides a form measuring device comprising a measuring section (302) for obtaining measurement data obtained by measuring a space between a straightedge rule (321) and an edge of an object to be measured (305) paired with each other, a function value setting section for setting form-function values, which indicates distances from a reference line R to the straightedge rule (321) and to edges of the object to be measured, and angle-function values ?, which indicates internal angles of the object to be measured 305 and an angle formed by the straightedge rules (321), a simultaneous equation deriving section for deriving simultaneous equations for pairs each consisting of the straightedge rule (321) and an edge of the object to be measured (305) based on the measurement data, and a simultaneous equation processing section for processing the derived simultaneous equations.

Abstract: The present invention provides a form measuring device including a measuring section (302) for obtaining measurement data obtained by measuring a space between a straightedge rule (321) and an edge of an object to be measured (305) paired with each other, a function value setting section for setting form-function values, which indicates distances from a reference line R to the straightedge rule (321) and to edges of the object to be measured, and angle-function values ?, which indicates internal angles of the object to be measured 305 and an angle formed by the straightedge rules (321), a simultaneous equation deriving section for deriving simultaneous equations for pains each consisting of the straightedge rule (321) and an edge of the object to be measured (305) based on the measurement data, and a simultaneous equation processing section for processing the derived simultaneous equations.

Abstract: Measured values obtained in a measuring machine to be estimated are provided to estimate errors in the measured values. Based on the estimated errors in the measured values, a covariance matrix or correlation matrix of measured values is derived. The covariance matrix or correlation matrix is then subjected to eigenvalue decomposition to derive eigenvalues and eigenvectors. A normal random number with an expected value of 0 and a variance equal to an eigenvalue corresponding to the eigenvalue is generated as a coefficient of coupling for each eigenvector, and all eigenvectors are linearly coupled to generate pseudo-measured values of the measuring machine. The generated pseudo-measured values are subjected to statistic processing to estimate uncertainty of the measuring machine.

Abstract: The present invention provides a form measuring device comprising a measuring section (302) for obtaining measurement data obtained by measuring a space between a straightedge rule (321) and an edge of an object to be measured (305) paired with each other, a function value setting section for setting form-function values, which indicates distances from a reference line R to the straightedge rule (321) and to edges of the object to be measured, and angle-function values ?, which indicates internal angles of the object to be measured 305 and an angle formed by the straightedge rules (321), a simultaneous equation deriving section for deriving simultaneous equations for pains each consisting of the straightedge rule (321) and an edge of the object to be measured (305) based on the measurement data, and a simultaneous equation processing section for processing the derived simultaneous equations.

Abstract: A reference device having a sphere positioned within a measurement space by an object three-dimensional measuring machine having a spherical probe contacting the spherical probe with six or more measurement points uniformly distributed on the spherical surface of the sphere to measure central coordinates of the sphere of the reference device by the object three-dimensional measuring machine and calibrating the object three-dimensional measuring machine based on the central coordinates obtained.

Abstract: A reference measuring machine previously calibrated and an object measuring machine to be calibrated are positioned in such a manner that a measurement space by the reference measuring machine is superimposed on a measurement space by the object measuring machine. First measurement values by the reference measuring machine and second measurement values by the object measuring machine are acquired each on plural points in the measurement spaces respectively by the reference measuring machine and the object measuring machine. The object measuring machine can be calibrated based on the first- and second measurement values.

Abstract: A reference device having a sphere positioned within a measurement space by an object three-dimensional measuring machine having a spherical probe contacting the spherical probe with six or more measurement points uniformly distributed on the spherical surface of the sphere to measure central coordinates of the sphere of the reference device by the object three-dimensional measuring machine and calibrating the object three-dimensional measuring machine based on the central coordinates obtained.

Abstract: A reference measuring machine previously calibrated and an object measuring machine to be calibrated are positioned in such a manner that a measurement space by the reference measuring machine is superimposed on a measurement space by the object measuring machine. First measurement values by the reference measuring machine and second measurement values by the object measuring machine are acquired each on plural points in the measurement spaces respectively by the reference measuring machine and the object measuring machine. The object measuring machine can be calibrated based on the first and second measurement values. The object measuring machine includes a first guide mechanism consisting of a first guide and a first slider located on the basis of a first base plate for mounting a work thereon. The reference measuring machine includes a second guide mechanism consisting of a second guide and a second slider located on the basis of a second base plate for mounting the object measuring machine thereon.