Abstract: A substrate processing apparatus according to the embodiment includes: a substrate holding unit that holds a substrate; a rotation support unit that supports the substrate holding unit and rotates the substrate n a circumferential direction; a drive unit that drives the substrate holding unit with respect to the rotation support unit in a plane direction of the substrate; a detection unit that detects an outer edge portion of the substrate; a chemical liquid discharge unit that discharges a chemical liquid to the outer edge portion of the substrate; and a control unit that causes the drive unit to drive the substrate holding unit based on the outer edge portion detected by the detection unit in a manner that a center position in a plane of the substrate matches a rotation axis of the rotation support unit.

Abstract: A rotor hub comprises an inside cylindrical portion extending in an axial direction on an inner surface side of a rotor yoke and an outside cylindrical portion extending in the axial direction on an outer surface side of the rotor yoke, a motor gear wheel is integrally moulded on a portion of said outside cylindrical portion, and a rotor unit is assembled with a stator unit in such a way that a fixed shaft is inserted into a cylindrical hole in the rotor hub and a rotor magnet and pole teeth are facing.

Abstract: A substrate processing apparatus according to the embodiment includes: a substrate holding unit that holds a substrate; a rotation support unit that supports the substrate holding unit and rotates the substrate n a circumferential direction; a drive unit that drives the substrate holding unit with respect to the rotation support unit in a plane direction of the substrate; a detection unit that detects an outer edge portion of the substrate; a chemical liquid discharge unit that discharges a chemical liquid to the outer edge portion of the substrate; and a control unit that causes the drive unit to drive the substrate holding unit based on the outer edge portion detected by the detection unit in a manner that a center position in a plane of the substrate matches a rotation axis of the rotation support unit.

Abstract: A stator core is integrally moulded with an insulator employing an insulating resin material, together with a fixed shaft which is inserted into a centre hole in a core back portion, and the stator core and a motor circuit board are assembled as a single piece by mating a plurality of circuit board insertion pieces protruding on an axial end of the insulator on the opposite side to an output end with circuit board insertion holes.

Abstract: A brushless motor that can uniformly wind a coil winding at a low cost even with a stator core in which intervals between tooth tips of a plurality of pole teeth provided in a circumferential direction of an annular section to protrude in a radial direction differ. An auxiliary tooth tip section is formed integrally on a tooth tip of a required pole tooth of a stator core in which a plurality of pole teeth are provided in a circumferential direction of an annular section to protrude in a radial direction, and in which circumferential intervals between adjacent tooth tips are not uniform, and gaps between the tooth tips of all the pole teeth of the stator core are formed uniform.

Abstract: A stator core is integrally moulded with an insulator employing an insulating resin material, together with a fixed shaft which is inserted into a centre hole in a core back portion, and the stator core and a motor circuit board are assembled as a single piece by mating a plurality of circuit board insertion pieces protruding on an axial end of the insulator on the opposite side to an output end with circuit board insertion holes.

Abstract: A rotor hub comprises an inside cylindrical portion extending in an axial direction on an inner surface side of a rotor yoke and an outside cylindrical portion extending in the axial direction on an outer surface side of the rotor yoke, a motor gear wheel is integrally moulded on a portion of said outside cylindrical portion, and a rotor unit is assembled with a stator unit in such a way that a fixed shaft is inserted into a cylindrical hole in the rotor hub and a rotor magnet and pole teeth are facing.

Abstract: According to one embodiment, a controller calculates an estimation temperature profile, which represents a change with time in temperature of a substrate mounting surface in a state where a substrate is placed on a substrate stage, from warp amount information indicating a warp of the substrate. Further, the controller detects abnormality of a placement state of the substrate, on a basis of a difference between an actual measurement temperature profile, which represents a change with time in actual temperature measured by a temperature sensor in a state where the substrate is placed on the substrate stage, and the estimation temperature profile.

Abstract: According to one embodiment, a controller calculates an estimation temperature profile, which represents a change with time in temperature of a substrate mounting surface in a state where a substrate is placed on a substrate stage, from warp amount information indicating a warp of the substrate. Further, the controller detects abnormality of a placement state of the substrate, on a basis of a difference between an actual measurement temperature profile, which represents a change with time in actual temperature measured by a temperature sensor in a state where the substrate is placed on the substrate stage, and the estimation temperature profile.

Abstract: A brushless motor that can uniformly wind a coil winding at a low cost even with a stator core in which intervals between tooth tips of a plurality of pole teeth provided in a circumferential direction of an annular section to protrude in a radial direction differ. An auxiliary tooth tip section is formed integrally on a tooth tip of a required pole tooth of a stator core in which a plurality of pole teeth are provided in a circumferential direction of an annular section to protrude in a radial direction, and in which circumferential intervals between adjacent tooth tips are not uniform, and gaps between the tooth tips of all the pole teeth of the stator core are formed uniform.

Abstract: According to one embodiment, there is provided a chemical liquid supply system including a chemical liquid supply apparatus and a monitoring apparatus. The chemical liquid supply apparatus includes a nozzle, a filter, a first pressure gauge, and a second pressure gauge. The first and the second pressure gauge are disposed on the pipeline, respectively at a chemical liquid supply-source side and chemical liquid delivery side of the filter. The monitoring apparatus is configured to determine a state of the filter based on first differential pressure time information in which a differential pressure is acquired in a period until a time point of a lapse of a predetermined time since a start of pneumatic feeding of the chemical liquid to the nozzle. The differential pressure is a difference between a first pressure value measured by the first pressure gauge and a second pressure value measured by the second pressure gauge.

Abstract: In one embodiment, a pattern forming method includes forming a first film on a substrate that includes a convex portion and a concave portion so as to expose an upper end of the convex portion. The method further includes forming a photosensitive second film on the first film so as to cover the upper end of the convex portion. The method further includes exposing the second film to light. The method further includes developing the second film with a development liquid to form a second pattern of the second film. The method further includes dissolving and removing the first film exposed from the second pattern with a liquid to form a first pattern of the first film.

Abstract: A universal joint yoke includes: a cylindrical portion for fixing a shaft; a slit that is formed in the cylindrical portion and that extends from one end of the cylindrical portion in an axial direction of the cylindrical portion, which is a first direction; a reinforcement flange that extends from the other end of the cylindrical portion radially outward with respect to the cylindrical portion; and a pair of arms that extend from the reinforcement flange on a side opposite to a side on which the cylindrical portion is provided and that are swingably coupled to another yoke via a coupling shaft.

Abstract: A universal joint yoke includes: a cylindrical portion for fixing a shaft; a slit that is formed in the cylindrical portion and that extends from one end of the cylindrical portion in an axial direction of the cylindrical portion, which is a first direction; a reinforcement flange that extends from the other end of the cylindrical portion radially outward with respect to the cylindrical portion; and a pair of arms that extend from the reinforcement flange on a side opposite to a side on which the cylindrical portion is provided and that are swingably coupled to another yoke via a coupling shaft.

Abstract: An exhaust gas purification device (6) comprises: first and second catalyst carriers (21, 22) interposed in an exhaust passage (8) of an engine (1), which purify an exhaust gas; a case (20) provided in the exhaust passage, which houses the first and second catalyst carriers (21, 22) in series in an exhaust gas flow direction; an annular carrier holder (24) interposed between the first and second catalyst carriers (21, 22), which holds the first and second catalyst carriers (21, 22) via a buffering member (23) and has an opening (34) which connects an inner peripheral side and an outer peripheral side; a sensor (10) which detects the state of the exhaust gas flowing through the interior of the case (20); and a sensor attachment portion (26) provided in the case (20), which connects the interior and exterior of the case (20) in an orientation that is substantially orthogonal to the exhaust gas flow direction.

Abstract: An exhaust gas purification device (6) comprises: first and second catalyst carriers (21, 22) interposed in an exhaust passage (8) of an engine (1), which purify an exhaust gas; a case (20) provided in the exhaust passage, which houses the first and second catalyst carriers (21, 22) in series in an exhaust gas flow direction; an annular carrier holder (24) interposed between the first and second catalyst carriers (21, 22), which holds the first and second catalyst carriers (21, 22) via a buffering member (23) and has an opening (34) which connects an inner peripheral side and an outer peripheral side; a sensor (10) which detects the state of the exhaust gas flowing through the interior of the case (20); and a sensor attachment portion (26) provided in the case (20), which connects the interior and exterior of the case (20) in an orientation that is substantially orthogonal to the exhaust gas flow direction.

Abstract: A semiconductor device having a seal member of insulative resin, tab suspension leads and leads exposed to the mounting surface of the seal member, a semiconductor element located in the seal member and fixed by an adhesive of the tab surface, and conductive wires for electrically connecting electrodes of the semiconductor element to the leads. At least a lead portion of the leads has an inverted trapezoid-like section configured of a upper surface embedded in the seal member, a lower surface exposed from the seal member, and side surfaces connecting the two side edges of the upper and lower surfaces. Two side edges of the upper surface are formed with machined surfaces, respectively, having one end connected to the upper surface and the other end connected to side surfaces. The machined surfaces are formed by the pressing process in different directions of extension with the upper and side surfaces.

Abstract: The disk drive unit is capable of restraining deformation and vibrations of a disk medium without enlarging size and increasing weight. The disk drive unit, which rotates the disk medium so as to read data from and/or write data in the disk medium, comprises: a pick-up for reading data from and/or write data in the disk medium, the pick-up moving in a prescribed direction; and a top case for covering over an upper face of the disk medium, the top case having an inner face, from which a projection is projected toward the disk medium in the direction perpendicular to the prescribed direction.

Abstract: A highly reliable non-leaded semiconductor device having large terminal strength. A non-leaded semiconductor device having a seal member of insulative resin, tab suspension leads and leads exposed to the mounting surface of the seal member, a semiconductor element located in the seal member and fixed by an adhesive of the tab surface, and conductive wires for electrically connecting electrodes of the semiconductor element and leads to each other. At least a portion of the leads has an inverted trapezoid-like section configured of upper surface embedded in the seal member, lower surface opposed to the upper surface and exposed from the seal member, and side surfaces connecting the two side edges of the upper surface and the lower surface. The two side edges of the upper surface are formed with machined surfaces, respectively, having an end connected to upper surface and the other end connected to side surfaces.

Abstract: There is disclosed a high-pressure compressor comprising a compression mechanism for reciprocating/driving a piston with respect to a conventional cylinder by rotation of a motor and compressing an operating fluid sucked by this driving to generate the high-pressure operating fluid according to improvements in a piston shape, positions of a cylinder operation surface and the piston, specifics shapes of the cylinder and piston, and connecting constitution of the piston to a connecting rod, which solves problems such as occurrence of wear on a cylinder inner surface by displacement of the piston, size enlargement by an increase of a removal capacity, difficulty in processing the piston and connecting rod, and a large top clearance.