Patents by Inventor Makoto ISHIGO

Makoto ISHIGO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning method and film deposition method
    Patent number: 11359279
    Abstract: A cleaning method for dry cleaning a susceptor disposed in a process chamber of a film deposition apparatus is provided. In the method, a protective member is placed on a substrate receiving region provided in the susceptor. A cleaning gas is supplied to the susceptor having the protective member placed on the substrate receiving region, thereby removing a film deposited on a surface of the susceptor by etching.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: June 14, 2022
    Assignee: Tokyo Electron Limited
    Inventors: Hitoshi Kato, Makoto Ishigo, Jun Sato
  • CLEANING METHOD AND FILM DEPOSITION METHOD
    Publication number: 20200141001
    Abstract: A cleaning method for dry cleaning a susceptor disposed in a process chamber of a film deposition apparatus is provided. In the method, a protective member is placed on a substrate receiving region provided in the susceptor. A cleaning gas is supplied to the susceptor having the protective member placed on the substrate receiving region, thereby removing a film deposited on a surface of the susceptor by etching.
    Type: Application
    Filed: October 29, 2019
    Publication date: May 7, 2020
    Inventors: Hitoshi KATO, Makoto ISHIGO, Jun SATO