Patents by Inventor Makoto KANESHIMA

Makoto KANESHIMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cooling device for semiconductor inspection apparatus to adjust temperature of inspection apparatus of semiconductor wafer
    Patent number: 10816576
    Abstract: In a cooling device 20 of the present invention, a bypass passage 20C for allowing circulating liquid to partly or wholly bypass a heat exchanger 15; a first valve 21; and a second valve 22 are provided. Thus, the a cooling device 20 having a refrigerator 100 capable of cooling to a low temperature can be operated even at high temperature and heat can be removed even when the inspection temperature is high. Thus, the inspection can be performed both cases when the inspection temperature is high and low. Consequently, the semiconductor wafer generating a large amount of heat during the inspection can be also inspected without causing problems.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: October 27, 2020
    Assignee: ADTEX Inc.
    Inventors: Hiroo Sato, Satoshi Kobayashi, Makoto Kaneshima
  • COOLING DEVICE FOR SEMICONDUCTOR INSPECTION APPARATUS
    Publication number: 20190219614
    Abstract: In a cooling device 20 of the present invention, a bypass passage 20C for allowing circulating liquid to partly or wholly bypass a heat exchanger 15; a first valve 21; and a second valve 22 are provided. Thus, the a cooling device 20 having a refrigerator 100 capable of cooling to a low temperature can be operated even at high temperature and heat can be removed even when the inspection temperature is high. Thus, the inspection can be performed both cases when the inspection temperature is high and low. Consequently, the semiconductor wafer generating a large amount of heat during the inspection can be also inspected without causing problems.
    Type: Application
    Filed: June 1, 2016
    Publication date: July 18, 2019
    Inventors: Hiroo SATO, Satoshi KOBAYASHI, Makoto KANESHIMA