Abstract: An improved apparatus for use in replacing a polishing pad is disclosed. processing system includes: a polishing device configured to polish a workpiece; a pad break-in device configured to perform a pad break-in process of a polishing pad; and a pad transporting device configured to transport a pad structure from the pad break-in device to the polishing device. The pad structure includes at least the polishing pad. The pad transporting device includes a liquid receiving tray arranged under the holding hand and configured to receive liquid dropped from the pad structure.

Abstract: Provided is a system which manages a user community provided in an information processing system, in which user community information provided by a user is made available to another user for reference. The system includes a storage section which stores an audit policy defining contents of information to be permitted to be registered in each of a plurality of communities, by associating the audit policy with each of the communities; a detection section which detects a community to which information is provided in response to provision of the information by a user; and a registration control section which inhibits registration of information, provided by a user, in a detected user community on condition that the information violates an audit policy corresponding to the user community.

Abstract: Provided is a system which manages a user community provided in an information processing system, in which user community information provided by a user is made available to another user for reference. The system includes a storage section which stores an audit policy defining contents of information to be permitted to be registered in each of a plurality of communities, by associating the audit policy with each of the communities; a detection section which detects a community to which information is provided in response to provision of the information by a user; and a registration control section which inhibits registration of information, provided by a user, in a detected user community on condition that the information violates an audit policy corresponding to the user community.

Abstract: Provided is a system which manages a user community provided in an information processing system, in which user community information provided by a user is made available to another user for reference. The system includes a storage section which stores an audit policy defining contents of information to be permitted to be registered in each of a plurality of communities, by associating the audit policy with each of the communities; a detection section which detects a community to which information is provided in response to provision of the information by a user; and a registration control section which inhibits registration of information, provided by a user, in a detected user community on condition that the information violates an audit policy corresponding to the user community.

Abstract: A three-dimensional memory cell, suitable for electrically erasable programmable read only memories (EEPROMS), which has direct-write cell capability is disclosed. The memory cell is utilized in the fabrication of non-volatile, direct-write EEPROM arrays with high integration density. A typical EEPROM array includes a plurality of elongated shallow trenches formed in a semiconductor substrate. Multiple direct-write EEPROM cells are disposed within each elongated trench such that each EEPROM cell shares a recall gate and a program gate with another cell in the same trench. Preferably, a silicon rich dielectric (such as silicon rich oxide) disposed between each floating gate and its associated programming and recall gates. Both common source diffusion and isolated source diffusion embodiments are disclosed. Further, various fabrication methods for the direct-write EEPROM arrays presented are described.

Abstract: A three-dimensional memory cell, suitable for electrically erasable programmable read only memories (EEPROMS), which has direct-write cell capability is disclosed. The memory cell is utilized in the fabrication of non-volatile, direct-write EEPROM arrays with high integration density. A typical EEPROM array includes a plurality of elongated shallow trenches formed in a semiconductor substrate. Multiple direct-write EEPROM cells are disposed within each elongated trench such that each EEPROM cell shares a recall gate and a program gate with another cell in the same trench. Preferably, a silicon rich dielectric (such as silicon rich oxide) disposed between each floating gate and its associated programming and recall gates. Both common source diffusion and isolated source diffusion embodiments are disclosed. Further, various fabrication methods for the direct-write EEPROM arrays presented are described.

Abstract: A three-dimensional memory cell, suitable for electrically erasable programmable read only memories (EEPROMS), which has direct-write cell capability is disclosed. The memory cell is utilized in the fabrication of non-volatile, direct-write EEPROM arrays with high integration density. A typical EEPROM array includes a plurality of elongated shallow trenches formed in a semiconductor substrate. Multiple direct-write EEPROM cells are disposed within each elongated trench such that each EEPROM cell shares a recall gate and a program gate with another cell in the same trench. Preferably, a silicon rich dielectric (such as silicon rich oxide) disposed between each floating gate and its associated programming and recall gates. Both common source diffusion and isolated source diffusion embodiments are disclosed. Further, various fabrication methods for the direct-write EEPROM arrays presented are described.