Abstract: An electric motor controller with a screw terminal block including: a terminal fitting connected with a solderless terminal having a crimping portion crimped to wire cores of an electrical wire; a plate-shaped square washer having a cut-out portion in at least one edge thereof, the cut-out portion for avoiding interference with the crimping portion of the solderless terminal or the wire cores projecting from the crimping portion to an end of the electrical wire; and a terminal screw fixing the solderless terminal between the square washer and the terminal fitting.

Abstract: Provided are rice grains where various water-soluble high molecular substances are retained without applying pressure to the rice grains. Grains of mutant rice (wx/ae rice), which is deficient in both amylopectin branching enzyme (BEIIb) and amylose synthetase I (GBSSI), are immersed in an aqueous solution of a water-soluble high molecular substance such as digestion resistant dextrin, arabinogalactan, or polyphenol under ordinary pressure at room temperature and are then dried at 60° C. or less, preferably about 50° C., thereby producing rice grains impregnated with and retaining the high molecular substance.

Abstract: A plant operation support system of the present invention is characterized by the following: The present invention relates to a plant operation support system which performs process simulations in parallel with operations of an actual plant and predicts operations of the actual plant on the basis of the results simulated. The plant operation support system modifies a simulation model on the basis of actual data as required, modifies the simulation model on the basis of actual data received from the actual plant, and uses the modified simulation model to perform simulations in parallel with operations of the actual plant. Accordingly, the plant operation support system can reflect plant status in the simulation model consecutively and predict operations of the actual plant in a highly accurate manner.

Abstract: Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor holds a holder, and sets an irradiation angle ? of an ion beam by rotating this holder around a center axis that is parallel to the X-axis. A Y-axis linear motor causes the holder and the irradiation angle setting motor to ascend and descent in the direction of the Y-axis. A Z-axis linear motor moves the holder, the irradiation angle setting motor and the Y-axis linear motor in the direction of the Z-axis. A control unit operation-controls synchronously the Y-axis linear motor and the Z-axis linear motor so that a substrate holding surface of the holder reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface and orthogonal to the X-axis.

Abstract: Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor holds a holder, and sets an irradiation angle ? of an ion beam by rotating this holder around a center axis that is parallel to the X-axis. A Y-axis linear motor causes the holder and the irradiation angle setting motor to ascend and descent in the direction of the Y-axis. A Z-axis linear motor moves the holder, the irradiation angle setting motor and the Y-axis linear motor in the direction of the Z-axis. A control unit operation-controls synchronously the Y-axis linear motor and the Z-axis linear motor so that a substrate holding surface of the holder reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface and orthogonal to the X-axis.

Abstract: A process control system has a data storage section which saves process data output from a sensor placed in a plant which performs a continuous process, a trace information processing section which acquires process information of a product moving in the plant and being discrete in a predetermined unit from the process data saved in the data storage section, a state estimation section which estimates a property of the discrete product based on the acquired process information, and a control section which controls a control apparatus placed in the plant so that an estimation value is closed to an objective value.

Abstract: A plant operation support system of the present invention is characterized by the following: The present invention relates to a plant operation support system which performs process simulations in parallel with operations of an actual plant and predicts operations of the actual plant on the basis of the results simulated. The plant operation support system modifies a simulation model on the basis of actual data as required, modifies the simulation model on the basis of actual data received from the actual plant, and uses the modified simulation model to perform simulations in parallel with operations of the actual plant. Accordingly, the plant operation support system can reflect plant status in the simulation model consecutively and predict operations of the actual plant in a highly accurate manner.

Abstract: A holder driving device has: a holder holding a substrate, a shaft supporting the holder, a driver for driving the shaft reciprocatingly and linearly in the direction along the shaft, a bearing unit having mechanical linear motion bearings for supporting the shaft thereon and having one or more stages of exhaust chambers surrounding the shaft; a vacuum pump for vacuum-pumping the exhaust chambers of the bearing unit; and a gas replacement mechanism for supplying dry gas, the humidity of which is lower than that of at least the surrounding atmosphere and the pressure of which is positive, from the outside of the bearing unit to at least the neighborhood of an atmosphere-side entrance portion of a gap between an end portion of the bearing unit one the side opposite to the vacuum vessel and the shaft passing the end portion, so as to replace the atmosphere near the entrance portion by the dry gas.