Abstract: The present invention has an object to provide an integrated circuit device having a Cu wiring, using a barrier layer which facilitates planarization. The present invention relates to an integrated circuit device having a Cu wiring layer, a barrier layer therefor and a dielectric layer, wherein the barrier layer is represented by a compositional formula of TaOxNy (the range of x being 0<x<2.5, and the range of y being 0<y<1). Further, the present invention relates to an integrated circuit device having a Cu wiring layer, a barrier layer therefor and a dielectric layer, wherein the barrier layer is represented by a compositional formula of Ta1−aMaObNc (M being at least one member selected from the group consisting of elements of Groups 3, 4, 6, 7, 8, 9, 10, 12, 13 and 14 of the long form of the periodic table, the range of a being 0<a<1, the range of b being 0<b<2.5, and the range of c being 0<c<1).

Abstract: A low reflectance transparent material having antisoiling properties, which comprises a transparent substrate and a multi-layer coating formed on the substrate, said coating comprising at least one thin layer of a condensation product containing a metal oxide, and a thin layer of a condensation product of a fluorine-containing silicon compound having a polyfluorinated carbon chain or a perfluorocarbon chain, formed thereon.

Abstract: SF.sub.6 is produced by a pyrolysis of SF.sub.5 Cl obtained by a reaction of sulfur or sulfur chloride with chlorine and an amine/hydrogen fluoride complex or a reaction of sulfur tetrafluoride with chlorine and an amine/hydrogen fluoride complex.

Abstract: An alkali metal hydroxide is produced by electrolyzing an aqueous solution of an alkali metal chloride fed into an anode compartment in a cell having an anode compartment and a cathode compartment formed by partitioning with a cation exchange membrane. A cation exchange membrane of a fluorinated polymer having carboxylic acid groups at a content of 0.9 to 2.0 meq./g. dry resin is used as said cation exchange membrane and a metal or a metal ion is incorporated in said aqueous solution of an alkali metal chloride to form a thin layer made of a metal hydroxide or oxide on the surface of said membrane in the anode compartment.

Abstract: An oxygen-containing cyclicfluoro compound selected from the group consisting of a perfluorolactone having the formula ##STR1## a perfluorocyclic ether having the formula ##STR2## and mixtures thereof is produced by reacting an .alpha.,.omega.-diiodoperfluoroalkane having the formulaI (CF.sub.2).sub.n Iwith fuming sulfuric acid, wherein n is all formulas ranges from 3 to 5.

Abstract: Ethylene-tetrafluorethylene copolymer compositions are stabilized against thermal degradation by incorporating therein a small amount of a copper compound.