Abstract: A method of manufacturing a liquid ejection head includes forming, on the substrate, a metal layer formed of a first metal, forming a liquid flow path pattern formed of a second metal that is a metal of a different kind from that of the first metal and that is dissolvable in a solution that does not dissolve the first metal, the liquid flow path pattern being formed on at least a part of a surface of the metal layer, covering the metal layer and the pattern with an inorganic material layer to be formed as the nozzle layer, forming the ejection orifices in the inorganic material layer, and removing the pattern by the solution. A standard electrode potential E1 of the first metal and a standard electrode potential E2 of the second metal have a relationship of E1>E2.

Abstract: Provided is a method for manufacturing a substrate for liquid ejection head including an ejection energy generating element and a nozzle layer including an ejection port and a liquid channel. The method includes the steps of: forming, on the substrate including the element, a metal mold member made of metal and having a flat surface, the metal mold member making up at least a part of a mold for the liquid channel, and a planarization layer made of the metal and having a flat surface to planarize a surface of the nozzle layer; coating the mold for the liquid channel and the planarization layer with negative-type photosensitive resin, thus forming a negative-type photosensitive resin layer to be the nozzle layer; exposing the resin layer to ultraviolet rays, thus forming the ejection port; and selectively removing the mold for the liquid channel, thus forming the liquid channel.

Abstract: The reduction in reliably of a liquid discharge head due to the dissolution of a protective layer is suppressed. A substrate for a liquid discharge head includes a base substrate, a heat-generating resistive layer placed on the base substrate, a pair of lines placed on the base substrate, and a protective layer covering the heat-generating resistive layer and the lines. The protective layer contains a material represented by the formula SixCyNx, where x+y+z=100, 30?x?59, y?5, and z?15 on an atomic percent basis.

Abstract: A liquid discharge apparatus includes: a liquid discharge head which includes; a discharge port to discharge a liquid; and a substrate including: an energy generating element for generating thermal energy to discharge the liquid from the liquid discharge port; a pair of electrodes connected to the energy generating element for driving thereof; an insulating layer of an insulating material provided to cover the energy generating element; and a metal layer of a metal material provided corresponding to the energy generating element to cover the insulating layer; and a driver unit which sets a first potential of one of the pair of electrodes substantially equal to the potential of the liquid and a second potential of the other one of the pair of electrodes lower than the first potential to drive the energy generating element.

Abstract: A surface analyzer 1 includes: a sample stage 6 for placing a sample 5; a source for generating multicharged ions 3 for irradiating a beam 4 of multicharged ions having a valence of 15 or higher to the sample 5 placed on the sample stage 6; a mass analyzer 8 for detecting secondary ions 7 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; a secondary electron detector 10 for detecting secondary electrons 9 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; and a controller of mass analyzer 12 for generating analysis start signals in response to the secondary electron signals received, and transmitting the start signals to the mass analyzer. The surface analyzer 1 enables high-quality analysis of the surface of the sample in short time by using the multicharged ions.

Abstract: A polarization separating element is configured to include a translucent substrate formed of a crystal material having birefringent properties and optically rotatory power and a polarization separating portion formed on the incidence-side surface of the translucent substrate so as to transmit a P-polarized light beam and reflect an S-polarized light beam. A reflecting element that reflects the S-polarized light beam reflected by the polarization separating portion is disposed so as to be separated approximately in parallel to the translucent substrate. A predetermined function is set such that the P-polarized light beam having passed through the polarization separating portion and been incident to the translucent substrate is converted so as to be parallel to the polarization plane of the S-polarized light beam so that the P-polarized light beam is output as the S-polarized light beam.

Abstract: A method for producing an inkjet recording head includes preparing the substrate having a through hole to be formed into a supply port, the through hole having openings on the first surface and the second surface, the substrate having a first protective layer disposed on the second surface, the first protective layer having an overhang extending into the region of the opening on the second surface. The method also includes forming a second protective layer so as to continuously cover at least the overhang of the first protective layer and the inner wall of the through hole, and removing a portion of the second protective layer corresponding to the opening on the first surface.

Abstract: A polarization separation device includes a transmissive substrate formed of crystalline material having a birefringent property and an optical rotatory property, and a polarization separation portion that is provided on an incidence-side surface of the transmissive substrate and transmits P-polarized light and reflects S-polarized light. A reflective element, which reflects the S-polarized light reflected by the polarization separation portion, is disposed substantially in parallel with the transmissive substrate. A phase difference plate is disposed at an emission-side of the transmissive substrate.

Abstract: A surface analyzer 1 includes: a sample stage 6 for placing a sample 5; a source for generating multicharged ions 3 for irradiating a beam 4 of multicharged ions having a valence of 15 or higher to the sample 5 placed on the sample stage 6; a mass analyzer 8 for detecting secondary ions 7 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; a secondary electron detector 10 for detecting secondary electrons 9 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; and a controller of mass analyzer 12 for generating analysis start signals in response to the secondary electron signals received, and transmitting the start signals to the mass analyzer. The surface analyzer 1 enables high-quality analysis of the surface of the sample in short time by using the multicharged ions.

Abstract: A method of manufacturing a liquid discharging head which includes a flow path forming member which has a discharge port for discharging a liquid and a liquid flow path communicating with the discharge port, and a base body having a liquid supply port which supplies the liquid flow path with the liquid, the method includes (1) forming a mold of the liquid flow path and a foundation member formed of a porous inorganic material over the base body, (2) applying an organic resin over the base body so as to cover the mold and the foundation member to form the flow path forming member, (3) forming the discharge port in the flow path forming member to form the liquid supply port in the base body, and (4) removing the mold to form the liquid flow path.

Abstract: A manufacturing method for a liquid-discharge head substrate including a base material provided with an energy generating element that generates energy utilized for discharging liquid, a noble metal layer including noble metal provided on a surface of the base material on energy generating element side, and a material layer provided to come into contact with the noble metal layer. The manufacturing method includes preparing the base material on which the material layer is provided, oxidizing a part of a surface of the material layer by discharging electricity in oxygen-containing gas, and providing the noble metal layer on the base material.

Abstract: On a liquid ejection head substrate, an upper protective layer, as well as coming into contact with a resin layer of a path forming member having an ejection opening, comes into contact with ink in a heat generating portion inside the channel formed. The upper protective layer contains iridium and silicon. The upper protective layer is configured so that, at a surface in contact with the ink and resin layer, Ir100-XSiX attains a 15 at. %?X?30 at. % silicon content rate, and that X approaches zero as a position in the upper protective layer approaches an adhesion layer. As a result, at the interface where the upper protective layer comes into contact with the path forming member, by the silicon attaining the heretofore described content rate, it is possible to improve the adhesion with the path forming member made of resin compared with a case of using iridium alone.

Abstract: A recording element substrate includes a substrate; an insulating layer disposed on the substrate; a plurality of heating portions which are arranged on the insulating layer and which produce thermal energy used to eject a liquid; and a plurality of heat conduction members, each being located between adjacent heating portions with respect to an arrangement direction of the heating portions, the heat conduction members being located between the substrate side principal surface of the insulating layer and the heating portion side principal surface of the insulating layer and having higher thermal conductivity than the insulating layer. The heat conduction members are in contact with a heat conduction layer which has higher thermal conductivity than the insulating layer.

Abstract: On the liquid ejection head substrate, an upper protective layer, as well as coming into contact with the resin layer which configures a path forming member such as a ejection opening, comes into contact with ink in an heat generating portion inside the channel formed. The upper protective layer contains iridium and silicon. The upper protective layer is configured so that, at a surface in contact with the ink and resin layer, Ir100-xSix attains a 15 at. %?X?30 at. % silicon content rate, and that X more becomes zero as a position in the upper protective layer more approaches an adhesion layer. As a result, at the interface where the upper protective layer comes into contact with the path forming member, by the silicon attaining the heretofore described content rate, it is possible to improve the adhesion with the path forming member made of resin compared with a case of using iridium alone.

Abstract: A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle beam apparatus using the same are disclosed. The multicharged ions generating source includes an ion source electrode (3) comprising an electron source (4), a drift tube (5) that constitutes an ion trapping region and a collector (6), a superconducting magnet (11) for ion entrapment, an ion infeed means (20, 22), a first vacuum chamber (2) receiving the ion source electrode (3), a second vacuum chamber (10) receiving the superconducting magnet (11), and a vacuum pumping unit (15, 16) provided for each of the first and second vacuum chambers. The first and the second vacuum chambers (2) and (10) are made removable from each other, and only the ion source electrode (3) to be held at extremely high vacuum can be baked for degassing.

Abstract: A method for producing an inkjet recording head includes preparing the substrate having a through hole to be formed into a supply port, the through hole having openings on the first surface and the second surface, the substrate having a first protective layer disposed on the second surface, the first protective layer having an overhang extending into the region of the opening on the second surface. The method also includes forming a second protective layer so as to continuously cover at least the overhang of the first protective layer and the inner wall of the through hole, and removing a portion of the second protective layer corresponding to the opening on the first surface.

Abstract: A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle beam apparatus using the same are disclosed. The multicharged ions generating source includes an ion source electrode (3) comprising an electron source (4), a drift tube (5) that constitutes an ion trapping region and a collector (6), a superconducting magnet (11) for ion entrapment, an ion infeed means (20, 22), a first vacuum chamber (2) receiving the ion source electrode (3), a second vacuum chamber (10) receiving the superconducting magnet (11), and a vacuum pumping unit (15, 16) provided for each of the first and second vacuum chambers. The first and the second vacuum chambers (2) and (10) are made removable from each other, and only the ion source electrode (3) to be held at extremely high vacuum can be baked for degassing.

Abstract: A wavelength-tunable light emitting device includes a substrate having an atomic-scale structure formed on a surface thereof, a needle member for locally applying a voltage through a vacuum space or a transparent insulating member to the substrate to cause a tunnel current to flow through the atomic-scale structure, and a variable-voltage power supply capable of varying voltage applied across the gap between the substrate and the needle member. The gap between the first member and the second member is as close as a few nm in length. A tunnel current flows from the tip of the needle member to the atomic-scale structure when a predetermined voltage is applied across the gap between the substrate and the needle member; and light is emitted from a tunneling region in which the tunnel current flows, because of an optical transition between respective localized states of the substrate and the needle.

Abstract: A wavelength-tunable light emitting device includes a substrate having an atomic-scale structure formed on a surface thereof, a needle member for locally applying a voltage through a vacuum space or a transparent insulating member to the substrate to cause a tunnel current to flow through the atomic-scale structure, and a variable-voltage power supply capable of varying voltage applied across the gap between the substrate and the needle member. The gap between the first member and the second member is as close as a few nm in length. A tunnel current flows from the tip of the needle member to the atomic-scale structure when a predetermined voltage is applied across the gap between the substrate and the needle member; and light is emitted from a tunneling region in which the tunnel current flows, because of an optical transition between respective localized states of the substrate and the needle.

Abstract: A spray nozzle for spraying anti-termite agent has a base portion including a supply portion having a generally cylindrical shape and being formed with one or a plurality of jetting ports at one side end in the axial direction of the supply portion, and a horn portion having one end portion attached to the jetting ports side of the base portion. The horn portion has a plurality of air suction holes peripherally at an adjacent position where the jetting ports are situated about the axial direction thereof, and air is sucked by utilizing the Venturi effect of jet streams of the agent in order to spray the agent in bubble form.