Abstract: A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.

Abstract: A transfer system includes a robot and a controller that controls an operation of the robot. The robot includes a hand that transfers a substrate, and a lift mechanism that moves up and down the hand. The hand includes a sensor that detects a distance to a lower surface of the substrate. The controller includes a storage unit, a detection unit, and a calculation unit. The storage unit stores placement information including a placement height at a placement position of the substrate. The detection unit detects a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height. The calculation unit calculates a deflection amount of the substrate based on a difference between the placement height and the separation height.

Abstract: A substrate transfer robot includes an extensible/retractable arm unit, a robot hand and a sensor unit. The extensible/retractable arm unit is configured to extend and retract in a horizontal direction. The robot hand is provided with prongs for holding a substrate. The robot hand includes a base end portion rotatably connected to a tip end portion of the extensible/retractable arm unit. The sensor unit is arranged to be rotated by a rotating force of the robot hand. The sensor unit is configured to, when rotated, intersect a lateral end portion of the substrate held by the prongs when seen in a plan view and to detect a lateral end position of the substrate.