Patents by Inventor Makoto Yabe
Makoto Yabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11688058Abstract: A pattern inspection apparatus includes an optical image acquisition mechanism to acquire an optical image of each of a plurality of regions on the inspection substrate where a pattern is formed, a plurality of comparison circuits to individually compare the optical image with a reference image corresponding to the optical image, an abnormality determination circuit to determine, based on comparison results, whether there is a region having an inspection abnormality in the plurality of regions, a malfunction diagnosis circuit to diagnose whether a comparison circuit that performed comparison for the region determined to have the inspection abnormality in the plurality of regions has a malfunction, and an assignment processing circuit to individually assign regions of the plurality of regions where comparison is to be performed to comparison circuits that are not diagnosed as malfunctions, and to exclude a comparison circuit diagnosed as a malfunction from the region assignment target.Type: GrantFiled: April 19, 2021Date of Patent: June 27, 2023Assignee: NuFlare Technology, Inc.Inventors: Makoto Yabe, Takafumi Inoue
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Publication number: 20210407061Abstract: A pattern inspection apparatus includes an optical image acquisition mechanism to acquire an optical image of each of a plurality of regions on the inspection substrate where a pattern is formed, a plurality of comparison circuits to individually compare the optical image with a reference image corresponding to the optical image, an abnormality determination circuit to determine, based on comparison results, whether there is a region having an inspection abnormality in the plurality of regions, a malfunction diagnosis circuit to diagnose whether a comparison circuit that performed comparison for the region determined to have the inspection abnormality in the plurality of regions has a malfunction, and an assignment processing circuit to individually assign regions of the plurality of regions where comparison is to be performed to comparison circuits that are not diagnosed as malfunctions, and to exclude a comparison circuit diagnosed as a malfunction from the region assignment target.Type: ApplicationFiled: April 19, 2021Publication date: December 30, 2021Applicant: NuFlare Technology, Inc.Inventors: Makoto YABE, Takafumi INOUE
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Patent number: 10540561Abstract: An inspection method includes a rough alignment process of acquiring optical images of first and second patterns previously set to confirm whether a position misalignment amount in a rotation direction of a sample with respect to an X or Y direction is equal to or smaller than a first acceptable value, and conforming whether the position misalignment amount is equal to or smaller than the first acceptable value on the basis of an acquisition result, and a fine alignment process of acquiring optical images of third patterns positioned on different corners of a rectangular frame constituted of four sides along the X or Y direction on an optical image of the sample and rotating a stage until a position misalignment amount detected based on the optical images of the third patterns becomes equal to or smaller than a second acceptable value being smaller than the first acceptable value.Type: GrantFiled: September 28, 2018Date of Patent: January 21, 2020Assignee: NUFLARE TECHNOLOGY, INC.Inventors: Makoto Yabe, Hiroteru Akiyama, Takafumi Inoue
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Publication number: 20190095740Abstract: An inspection method includes a rough alignment process of acquiring optical images of first and second patterns previously set to confirm whether a position misalignment amount in a rotation direction of a sample with respect to an X or Y direction is equal to or smaller than a first acceptable value, and conforming whether the position misalignment amount is equal to or smaller than the first acceptable value on the basis of an acquisition result, and a fine alignment process of acquiring optical images of third patterns positioned on different corners of a rectangular frame constituted of four sides along the X or Y direction on an optical image of the sample and rotating a stage until a position misalignment amount detected based on the optical images of the third patterns becomes equal to or smaller than a second acceptable value being smaller than the first acceptable value.Type: ApplicationFiled: September 28, 2018Publication date: March 28, 2019Applicant: NUFLARE TECHNOLOGY, INC.Inventors: Makoto YABE, Hiroteru AKIYAMA, Takafumi INOUE
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Patent number: 9165355Abstract: An inspection method comprising, virtually dividing a sample, in which a plurality of chip patterns are formed, into a plurality of strip-shaped stripes along a predetermined direction to acquire an optical image of the chip pattern in each of the stripes, performing filtering based on design data of the chip pattern to produce a reference image corresponding to the optical image, comparing the chip pattern using a die-to-database method and comparing a repetitive pattern portion in the chip pattern using a cell method, obtaining at least one of a dimension difference and a dimension ratio between a pattern of the optical image and a pattern of the reference image compared to the pattern of the optical image by the die-to-database method; and obtaining a dimension distribution of the plurality of chip patterns from at least one of the dimension difference and the dimension ratio.Type: GrantFiled: March 13, 2014Date of Patent: October 20, 2015Assignee: NuFlare Technology, Inc.Inventors: Hideo Tsuchiya, Manabu Isobe, Hiroteru Akiyama, Makoto Yabe, Takafumi Inoue, Nobutaka Kikuiri
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Publication number: 20150279024Abstract: An inspection method comprising, virtually dividing a sample, in which a plurality of chip patterns are formed, into a plurality of strip-shaped stripes along a predetermined direction to acquire an optical image of the chip pattern in each of the stripes, performing filtering based on design data of the chip pattern to produce a reference image corresponding to the optical image, comparing the chip pattern using a die-to-database method and comparing a repetitive pattern portion in the chip pattern using a cell method, obtaining at least one of a dimension difference and a dimension ratio between a pattern of the optical image and a pattern of the reference image compared to the pattern of the optical image by the die-to-database method; and obtaining a dimension distribution of the plurality of chip patterns from at least one of the dimension difference and the dimension ratio.Type: ApplicationFiled: March 13, 2014Publication date: October 1, 2015Applicant: NuFlare Technology, Inc.Inventors: Hideo TSUCHIYA, Manabu ISOBE, Hiroteru AKIYAMA, Makoto YABE, Takafumi INOUE, Nobutaka KIKUIRI
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Patent number: 6743099Abstract: A plurality of player characters are displayed simultaneously. Switches including at least one of a plurality of orientation input means are assigned to the respective player characters. At least one of the plurality of player characters has a first mode in which the player character operates in accordance with inputs made by the switches assigned to the player character, and a second mode in which the player character operates in accordance with a predetermined sub-program. Switching between the first and second modes is effected when there is performed input operation by any one of switches assigned to the player characters.Type: GrantFiled: January 29, 2002Date of Patent: June 1, 2004Assignee: Konami CorporationInventors: Makoto Yabe, Hiroki Satoyoshi, Yuji Kubo
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Publication number: 20030040364Abstract: In a fighting game in which a plurality of characters controlled by players are displayed on a display to fight with each other, a computer program provides a first mode in which at least three characters are displayed on a first screen to fight with each other, and a second mode in which two characters are displayed on a second screen to perform a man-to-man battle. A current mode of the fighting game is switched between the first mode and the second mode.Type: ApplicationFiled: August 8, 2002Publication date: February 27, 2003Applicant: KONAMI CORPORATIONInventors: Makoto Yabe, Hidehiro Hirata, Yuji Kubo, Kazuki Yamamura, Noriaki Okamura
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Publication number: 20020119811Abstract: A plurality of player characters are displayed simultaneously. Switches including at least one of a plurality of orientation input means are assigned to the respective player characters. At least one of the plurality of player characters has a first mode in which the player character operates in accordance with inputs made by the switches assigned to the player character, and a second mode in which the player character operates in accordance with a predetermined sub-program. Switching between the first and second modes is effected when there is performed input operation by any one of switches assigned to the player characters.Type: ApplicationFiled: January 17, 2002Publication date: August 29, 2002Applicant: KONAMI CORPORATIONInventors: Makoto Yabe, Hiroki Satoyoshi, Yuji Kubo
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Patent number: 6251012Abstract: The game system comprises an image display device; an operation input device issuing a signal corresponding to an operation of a player; a mode select device for selecting one mode between a breeding mode in which a breeding game is prepared and a competition mode in which a competition game is prepared; a breeding game control device for controlling a progress of the breeding game, and a competition game control device.Type: GrantFiled: October 1, 1998Date of Patent: June 26, 2001Assignee: Konami Co., Ltd.Inventors: Atsushi Horigami, Riichiro Kawahara, Mariko Koyama, Kenhei Gu, Atsushi Otani, Hidehiro Hirata, Makoto Yabe, Kazuhiko Kobari