Patents by Inventor Malcolm DELANEY

Malcolm DELANEY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for adjusting wafer performance using multiple RF generators
    Patent number: 11655540
    Abstract: Methods and apparatus for controlling a semiconductor process leverage phase shifting between at least two RF generators to improve wafer performance parameters. In some embodiments, an apparatus may include a first radio frequency (RF) generator, a second RF frequency generator, a cable connected between the first RF generator and the second RF generator wherein the cable is configured to synchronize the first RF generator and the second RF generator, and an adjustable phase shift assembly with a two-dimensional trace and an adjustable contact point. The adjustable phase shift assembly is connected to the cable and configured to alter at least one water performance parameter by changing a phase shift relationship between the first RF frequency generator and the second RF frequency generator.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: May 23, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Chong Jiang, Malcolm Delaney
  • METHODS AND APPARATUS FOR ADJUSTING WAFER PERFORMANCE USING MULTIPLE RF GENERATORS
    Publication number: 20210404065
    Abstract: Methods and apparatus for controlling a semiconductor process leverage phase shifting between at least two RF generators to improve wafer performance parameters. In some embodiments, an apparatus may include a first radio frequency (RF) generator, a second RF frequency generator, a cable connected between the first RF generator and the second RF generator wherein the cable is configured to synchronize the first RF generator and the second RF generator, and an adjustable phase shift assembly with a two-dimensional trace and an adjustable contact point. The adjustable phase shift assembly is connected to the cable and configured to alter at least one water performance parameter by changing a phase shift relationship between the first RF frequency generator and the second RF frequency generator.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 30, 2021
    Inventors: Chong JIANG, Malcolm DELANEY