Patents by Inventor Malcolm Emil Delaney

Malcolm Emil Delaney has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber matching and calibration
    Patent number: 11749543
    Abstract: A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system. Each of the plurality of sets of sensor data comprises a corresponding sensor value of the processing chamber mapped to a corresponding spacing value of the processing chamber. The method further includes providing the plurality of sets of sensor data as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of a health of the processing chamber. The method further includes causing, based on the one or more outputs, performance of one or more corrective actions associated with the processing chamber.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: September 5, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Xuesong Lu, Yu Lei, Anup Phatak, Hyman W. H. Lam, Chong Jiang, Malcolm Emil Delaney, Yufei Hu
  • CHAMBER MATCHING AND CALIBRATION
    Publication number: 20220005713
    Abstract: A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system. Each of the plurality of sets of sensor data comprises a corresponding sensor value of the processing chamber mapped to a corresponding spacing value of the processing chamber. The method further includes providing the plurality of sets of sensor data as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of a health of the processing chamber. The method further includes causing, based on the one or more outputs, performance of one or more corrective actions associated with the processing chamber.
    Type: Application
    Filed: July 6, 2020
    Publication date: January 6, 2022
    Inventors: Xuesong Lu, Yu Lei, Anup Phatak, Hyman Lam, Chong Jiang, Malcolm Emil Delaney, Yufei Hu