Abstract: The invention provides water enriched with ozone by generating ozone from oxygen using short-wavelength ultraviolet light and pumping the generated ozone under pressure through a 0.1-micron filter into a sealed housing of deionized water. The filter is fabricated of a material such as polytetrafluoroethylene which does not react with water and ozone. The filter apertures are sufficiently small to prevent the formation of gas bubbles in the outlet fluid. The highly-purified outlet fluid is usable immediately in semiconductor wafer cleaning.

Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.

Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.

Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.

Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columnns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.

Abstract: The preferred embodiment of the invention disclosed herein relates to an apparatus for testing semiconductor devices on a wafer containing a plurality of such devices. The apparatus includes a base having a support surface on which the semiconductor wafers can be located. The base further includes heater means for heating the surface and, thus, any wafers located thereon. Support stand means is associated with the base and extends above the support surface and a test probe unit connected in an electric test circuit is adjustably mounted on the support plate so that the probe unit is normal to and movable relative to the surface. Preferably, the test probe includes a tip that engages the wafer and this tip does not rotate when the position of the probe unit is adjusted.

Abstract: There is disclosed apparatus for growing a ribbon of crystalline material which apparatus comprises a furnace adapted to contain a melt from which the ribbon is to be grown and crystal pulling means spaced from the furnace and including crystal seed holding means and sliding means moving said crystal seed holding means toward and away from the furnace. Extending between the furnace and the crystal seed pulling means are inner and outer bellows means spaced apart from each other to define a space therebetween. This space may be purged with an inert gas when pulling crystal.

Abstract: A crystal seed holder assembly for retaining a crystal seed used to grow a ribbon of crystal by the EFG technique is disclosed. The holder assembly is arranged so that the seed is not subjected to fastener stress, can expand without thermal stress and can slide a limited distance relative to the holder assembly.

Abstract: Accurate metering and dispensing of small quantities of abrasive material comprised of particles or powder, or both is accomplished by feed apparatus comprising a rotatable tubular member having a threaded interior surface for transporting the abrasive material through the tubular member in response to rotation of the member about the axis thereof. The discharge portion of the tube is particularly adapted to dispense frequent, small quantities of the material rather than less frequent larger quantities.