Abstract: A sensor for measuring a gas property includes a reference cavity and a measuring cavity, wherein a reference sensor element is arranged in the reference cavity, and a measuring sensor element is arranged in the measuring cavity. The measuring cavity is fluidly connected to ambient gas, the reference cavity is hermetically sealed, and a gettering material is arranged in the reference cavity and configured to absorb gas molecules inside the reference cavity.

Abstract: A light steering system includes: a reflective structure configured to tilt about a first axis; a frame that includes a frame recess over which the reflective structure is suspended; and a suspension assembly that includes a piezoelectric corrugated structure coupled to and between the reflective structure and the frame. The piezoelectric corrugated structure includes a first corrugated surface including concentric rings of alternating peaks and valleys; a second corrugated surface arranged opposite to the first corrugated surface; a plurality of peak electrodes, each peak electrode being coupled to a respective peak of the first corrugated surface; a plurality of valley electrodes, each valley electrode being coupled to a respective valley of the first corrugated surface; and a common electrode layer coupled to the second corrugated surface, wherein the common electrode layer is arranged counter to the plurality of peak electrodes and to the plurality of valley electrodes.

Abstract: A scanning structure includes a mirror plate with a first symmetry axis coincident with a first scanning axis and a second symmetry axis coincident with a second scanning axis; a stiffening structure arranged underneath the mirror plate; and a connector ring. The stiffening structure includes an inner cylinder at a center; an outer ring arranged at a circumferential edge of the mirror plate; and two or more radial bars that extend in respective radial directions to couple the inner cylinder and the outer ring. Each radial bar is arranged at a first absolute radial angle relative to the first symmetry axis. The connector ring is coupled to the outer ring by a plurality of connector structures. Each connector structure is arranged at a second absolute radial angle relative to the first symmetry axis, the second absolute radial angle being less than or equal to the first absolute radial angle.

Abstract: A camera module includes a movable substrate comprising a first main surface and a second main surface arranged opposite to the first main surface; an image sensor mechanically coupled to the first main surface and configured to capture image data; a piezoelectric-actuated micro-electrical-mechanical systems (MEMS) platform mechanically coupled to the second main surface such that the movable substrate and the piezoelectric-actuated MEMS platform are configured to move in unison; at least one piezoelectric actuator coupled to the piezoelectric-actuated MEMS platform; and an actuation circuit configured to receive a motion sensor signal corresponding to a movement, generate at least one actuation signal based on the motion sensor signal, and provide the at least one actuation signal to the at least one piezoelectric actuator to produce a counter mechanical response at the piezoelectric-actuated MEMS platform in response to the movement indicated by the motion sensor signal.

Abstract: Provided is a piezoelectric device. The piezoelectric device includes a piezoelectric layer including a first surface and a second surface opposing each other. Furthermore, the piezoelectric device includes a first electrode formed on the first surface and a second electrode formed on the second surface. The piezoelectric device includes a dielectric material enclosing the piezoelectric layer. Additionally, the piezoelectric device includes a first interconnect electrically coupled to the first electrode and a second interconnect electrically coupled to the second electrode. The first electrode is arranged between the piezoelectric layer and each of the first interconnect and the second interconnect. The first interconnect and the second interconnect are arranged distant to the first electrode.

Abstract: A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.

Abstract: A light steering system includes: a reflective structure configured to tilt about a first axis; a frame that includes a frame recess over which the reflective structure is suspended; and a suspension assembly that includes a piezoelectric corrugated structure coupled to and between the reflective structure and the frame. The piezoelectric corrugated structure includes a first corrugated surface including concentric rings of alternating peaks and valleys; a second corrugated surface arranged opposite to the first corrugated surface; a plurality of peak electrodes, each peak electrode being coupled to a respective peak of the first corrugated surface; a plurality of valley electrodes, each valley electrode being coupled to a respective valley of the first corrugated surface; and a common electrode layer coupled to the second corrugated surface, wherein the common electrode layer is arranged counter to the plurality of peak electrodes and to the plurality of valley electrodes.

Abstract: A microelectromechanical system (MEMS) device including an oscillator structure configured to oscillate about a rotation axis; a frame that is rotationally fixed, the frame including a frame recess within which the oscillator structure is suspended; and a suspension assembly mechanically coupled to and between the oscillator structure and the frame, the suspension assembly configured to suspend the oscillator structure within the frame recess. The suspension assembly includes a central support beam that extends lengthwise along the rotation axis, the central support beam being mechanically coupled to and between the oscillator structure and the frame; a first outer support beam mechanically coupled to the oscillator structure and laterally displaced from the central support beam in a first direction orthogonal to the rotation axis; and at least one first interior support beam directly coupled to and between the central support beam and the first outer support beam.

Abstract: A microelectromechanical system (MEMS) device including an oscillator structure configured to oscillate about a rotation axis; a frame that is rotationally fixed, the frame including a frame recess within which the oscillator structure is suspended; and a suspension assembly mechanically coupled to and between the oscillator structure and the frame, the suspension assembly configured to suspend the oscillator structure within the frame recess. The suspension assembly includes a central support beam that extends lengthwise along the rotation axis, the central support beam being mechanically coupled to and between the oscillator structure and the frame; a first outer support beam mechanically coupled to the oscillator structure and laterally displaced from the central support beam in a first direction orthogonal to the rotation axis; and at least one first interior support beam directly coupled to and between the central support beam and the first outer support beam.