Abstract: An MEMS sound transducer is provided, having: at least one actuator; a radiation structure coupled to the actuator and configured as a separate element; a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps; and at least one screen arranged along at least one of the one or more gaps.

Abstract: Embodiments of the present disclosure describe MEMS sound transducers for generating sound, having an actuator, wherein the actuator is separated from a surrounding structure by one or more gaps and is configured to execute a relative movement between the actuator and the surrounding structure. Additionally, the MEMS sound transducer has the surrounding structure, wherein the actuator and the surrounding structure has a plurality of recesses and projections which are separated by one or more gaps, wherein the plurality of projections belonging to the actuator are arranged to interdigitate into the plurality of recesses belonging to the surrounding structure, and/or the plurality of projections belonging to the surrounding structure to interdigitate into the plurality of recesses belonging to the actuator.

Abstract: Embodiments of the present disclosure describe an MEMS sound transducer having an actuator and a structure surrounding the actuator, wherein the actuator is separated from the surrounding structure by one or several slits. Furthermore, the sound transducer includes at least one first diaphragm arranged on the actuator along at least one of the one or several slits; and at least one second diaphragm arranged on the surrounding structure along the slit of the one or several slits.

Abstract: A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.

Abstract: A microsystem has a first support element and a second support element, wherein a relative position of the first support element and the second support element among each other is variable. The microsystem has a permanent-magnetic unit connected to the first support element in a mechanically fixed manner and configured to generate a magnetic field. Additionally, the microsystem has a sensor unit connected to the second support element in a mechanically fixed manner and configured to detect the magnetic field and provide a sensor signal which is based on the magnetic field. The sensor signal indicates a relative position of the support elements among one another.

Abstract: A MEMS system includes a first permanent-magnetic microstructure and a second permanent-magnetic microstructure. The first permanent-magnetic microstructure is movable along a first direction. The second permanent-magnetic microstructure is arranged to be spaced apart from the first permanent-magnetic microstructure, wherein, by moving the first permanent-magnetic microstructure along the first direction, the second permanent-magnetic microstructure or one or more elements of the second permanent-magnetic microstructure are either moved or actuated in a second direction or undergo rotation.

Abstract: A MEMS includes a substrate having an element movably suspended relative to the substrate, the element having a first main surface and an opposite second main surface. The MEMS includes a first spring element connected between the substrate and a first column structure connected to the second main surface, and includes a second spring element connected between the substrate and a second column structure connected to the second main surface.

Abstract: A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.