Patents by Inventor Malte Hoffmann

Malte Hoffmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control system, optical system and method
    Patent number: 11630395
    Abstract: A control system, for example for an optical system, includes: an actuating element; a measuring element for acquiring actuating element measurement data of the actuating element; a regulating unit for generating a regulating signal for regulating the actuating element depending on the acquired actuating element meas-urement data; and a state monitoring unit for monitoring a state of the control system depending on the acquired actuating element measurement data. The state monitoring unit includes: a first processing unit for generating preprocessed state data depending on (i) the acquired actuating element measurement data and a physical model and/or a mathematical model of the actuating element, or (ii) the acquired actuating element measurement data, a physical model and/or a mathematical model of the actuating element and the generated regulating signal; and a second processing unit for determining the state of the control system depending on the preprocessed state data.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: April 18, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Malte Hoffmann, Gunther Schulz
  • CONTROL SYSTEM, OPTICAL SYSTEM AND METHOD
    Publication number: 20210364926
    Abstract: A control system, for example for an optical system, includes: an actuating element; a measuring element for acquiring actuating element measurement data of the actuating element; a regulating unit for generating a regulating signal for regulating the actuating element depending on the acquired actuating element meas-urement data; and a state monitoring unit for monitoring a state of the control system depending on the acquired actuating element measurement data. The state monitoring unit includes: a first processing unit for generating preprocessed state data depending on (i) the acquired actuating element measurement data and a physical model and/or a mathematical model of the actuating element, or (ii) the acquired actuating element measurement data, a physical model and/or a mathematical model of the actuating element and the generated regulating signal; and a second processing unit for determining the state of the control system depending on the preprocessed state data.
    Type: Application
    Filed: August 6, 2021
    Publication date: November 25, 2021
    Inventors: Malte Hoffmann, Gunther Schulz