Abstract: A measurement device includes a measurement head configured to capture dimensional measurement data of a measurement object. A guide structure is configured to move and guide at least one of the measurement head and the measurement object in a measurement volume of the measurement device. A measurement unit is configured to capture positional data of the guide structure based on which a pose of the measurement head can be calculated. Multiple temperature sensor units are configured to capture temperature data about the measurement volume. Each temperature sensor unit includes a carrier element, a temperature sensor connected to the carrier element, and a heating element connected to the carrier element. A control system is configured to process the dimensional measurement data and the positional data and, based on the temperature data, correct at least one of the dimensional measurement data and the positional data.

Abstract: An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.

Abstract: An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.