Patents by Inventor Mamoru ARUGA

Mamoru ARUGA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Prober
    Patent number: 11428727
    Abstract: An object of the present invention is to provide a prober that is able to carry out accurate inspection of semiconductor device in wafer state by reducing the effect of the external noises and the leakage of current and further by eliminating the stray capacitance of the chuck stage against the prober housing.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: August 30, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Katsuo Yasuta, Mamoru Aruga
  • PROBER
    Publication number: 20210156901
    Abstract: An object of the present invention is to provide a prober that is able to carry out accurate inspection of semiconductor device in wafer state by reducing the effect of the external noises and the leakage of current and further by eliminating the stray capacitance of the chuck stage against the prober housing.
    Type: Application
    Filed: March 25, 2019
    Publication date: May 27, 2021
    Applicant: Kabushiki Kaisha Nihon Micronics
    Inventors: Katsuo YASUTA, Mamoru ARUGA