Patents by Inventor Mamoru Sugita

Mamoru Sugita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4910549
    Abstract: In an exposure method of the present invention, exposure light is radiated onto a peripheral portion of a substrate to be processed while the substrate is rotated, and the rotational speed of the substrate is selectively decreased when a specific peripheral portion reaches an exposure area, thereby performing predetermined exposure of the substrate. An exposure apparatus of the present invention includes a mounting table on which the substrate is mounted, a rotating mechanism for rotating the mounting table at a predetermined rotational speed, a light radiating element arranged to oppose a mounting surface of the mounting table, light amount control means for controlling the amount of light radiated from the light radiating element onto the substrate, and rotational speed control means for controlling the rotational speed of the mounting table in accordance with the radiation amount of light from the light radiating element.
    Type: Grant
    Filed: August 26, 1988
    Date of Patent: March 20, 1990
    Assignees: Tokyo Electron Limited, Tel Kyushu Limited
    Inventor: Mamoru Sugita
  • Patent number: 4246543
    Abstract: A delayed AGC circuit in which an AGC detection output is divided into two portions, one of them is applied through buffer means to an IF amplification stage to thereby control the gain thereof, and the other portion is applied to a tuner through a threshold circuit to thereby control the gain thereof. A variable resistor or potentiometer for AGC delay adjustment and a high-frequency bypass device are connected at a point in the AGC signal path from the output of the buffer means to the IF amplification stage.
    Type: Grant
    Filed: April 24, 1979
    Date of Patent: January 20, 1981
    Assignee: Hitachi, Ltd.
    Inventors: Masaru Noda, Toshio Murakami, Mamoru Sugita