Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a staircase structure disposed over a substrate. The staircase structure includes a plurality of layer stacks, where each layer stack is made of a first material layer over a portion of a second material layer. The staircase structure further includes a plurality of landing pads, where each landing pad is disposed over another portion of the second material layer of a respective layer stack.

Abstract: The present invention discloses an elastic heat spreader for chip packaging, a packaging structure and a packaging method. The heat spreader includes a top cover plate and a side cover plate that extends outward along an edge of the top cover plate, wherein the top cover plate is configured to be placed on a chip, and at least a partial region of the side cover plate is an elastic member; and the elastic member at least enables the side cover plate to be telescopic in a direction perpendicular to the top cover plate. According to the present invention, a following problem is solved: delamination between the heat spreader and a substrate as well as the chip due to stress generated by different thermal expansion coefficients of the substrate, the heat spreader and the chip in a packaging process of a large-size product.

Abstract: The present invention discloses an electromagnetic shielding package structure and a package method thereof. The package method for the electromagnetic shielding package structure includes: providing a base plate of a copper raw material, and forming a transition layer after two photoresist film operations, wherein the transition layer includes conductive connecting ribs connecting functional pins to an outer side wall; mounting a chip. performing first encapsulating, and etching off the conductive connecting ribs connecting the functional pins to the outer side wall; performing secondary encapsulating on an etched part; and after forming a singulated body by cutting, blocking the connection between the functional pins and the outer side wall by a plastic package material, and only reserving grounding pins to be connected to the outer side wall through the conductive connecting ribs.