Patents by Inventor Man-Chong Wong

Man-Chong Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite insulator structure
    Patent number: 4600624
    Abstract: A composite insulator structure separating adjacent layers of patterned metal on an LSI chip is disclosed. The composite insulator consists of a relatively thick layer of sputtered oxide and a thin layer of plasma nitride. The relatively thin layer can be underneath, inside or on top of the thick layer. The relatively thin layer is conformal and able to cover projections on the underlying metal and prevent interlevel shorting between the patterned layers.
    Type: Grant
    Filed: September 20, 1983
    Date of Patent: July 15, 1986
    Assignee: International Business Machines Corporation
    Inventors: Robert R. Joseph, Man-Chong Wong
  • Contoured quartz anode plate
    Patent number: 4153528
    Abstract: Sputter deposited coating uniformity is improved by contouring the anode plate to provide thinner regions around the wafer edges so that more resputtered coating material is deposited at the wafer edge to compensate for the observed decrease in coating thickness at the edge.
    Type: Grant
    Filed: June 26, 1978
    Date of Patent: May 8, 1979
    Assignee: International Business Machines Corporation
    Inventors: Robert H. Dykeman, Man-Chong Wong