Patents by Inventor Man Ghil Han

Man Ghil Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming trench isolation
    Patent number: 7759216
    Abstract: A method for forming a trench isolation in a semiconductor device is provided. This is a novel method for rounding the top corners of trench isolations. The method ensures that rounded corner portions with a uniform shape are consistently formed regardless of the pattern densities of active areas. The method increases the reliability of semiconductor integrated circuit devices, without degrading electrical characteristics, and making it easier to achieve high integration and performance in semiconductor integrated circuit devices.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: July 20, 2010
    Assignee: Dongbu Hitek Co., Ltd.
    Inventors: Sang Wook Ryu, Man Ghil Han
  • METHOD FOR FORMING TRENCH ISOLATION
    Publication number: 20080160720
    Abstract: A method for forming a trench isolation in a semiconductor device is provided. This is a novel method for rounding the top corners of trench isolations. The method ensures that rounded corner portions with a uniform shape are consistently formed regardless of the pattern densities of active areas. The method increases the reliability of semiconductor integrated circuit devices, without degrading electrical characteristics, and making it easier to achieve high integration and performance in semiconductor integrated circuit devices.
    Type: Application
    Filed: November 30, 2007
    Publication date: July 3, 2008
    Applicant: DONGBU HITEK CO., LTD.
    Inventors: Sang Wook RYU, Man Ghil HAN