Patents by Inventor Man Gu

Man Gu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240429237
    Abstract: A semiconductor device includes an insulating layer, a first semiconductor layer over the insulating layer, a diffusion break structure between a first active region and a second active region and including a first insulating pattern over the insulating layer and an opening over the first insulating pattern, and a conductive gate material over the opening.
    Type: Application
    Filed: June 23, 2023
    Publication date: December 26, 2024
    Inventors: Anton TOKRANOV, Man GU, Eric Scott KOZARSKY, George MULFINGER, Hong YU
  • Patent number: 12132080
    Abstract: A FinFET includes a semiconductor fin, and a source region and a drain region in the same semiconductor fin. The drain region has a first fin height above a trench isolation; and the source region has a second fin height above the trench isolation. The first fin height is less than the second fin height. The FinFET may be used, for example, in a scaled laterally diffused metal-oxide semiconductor (LDMOS) application, and exhibits reduced parasitic capacitance for improved radio frequency (RF) performance. A drain extension region may have the first fin height, and a channel region may have the second fin height. A method of making the FinFET is also disclosed.
    Type: Grant
    Filed: October 28, 2021
    Date of Patent: October 29, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Man Gu, Wenjun Li
  • Patent number: 12020937
    Abstract: Semiconductor structures include a channel region, a gate dielectric on the channel region, source and drain structures on opposite sides of the channel region, and a gate conductor between the source and drain structures on the gate dielectric. The source and drain structures include source and drain silicides. The gate conductor includes a gate conductor silicide. The gate conductor silicide is thicker than the source and drain silicides.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: June 25, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Jianwei Peng, Hong Yu, Man Gu, Eric S. Kozarsky
  • Publication number: 20240063225
    Abstract: A substrate is provided. The substrate includes a base, a semiconductor layer over the base, and an insulator layer between the base and the semiconductor layer. The semiconductor layer has a first semiconductor layer portion having a first thickness, a second semiconductor layer portion having a second thickness, and a third semiconductor layer portion having a third thickness, and the first thickness, the second thickness, and the third thickness are different from each other.
    Type: Application
    Filed: August 17, 2022
    Publication date: February 22, 2024
    Inventors: DAVID PRITCHARD, HONGRU REN, SHAFIULLAH SYED, HONG YU, MAN GU, JIANWEI PENG
  • Publication number: 20240030343
    Abstract: A transistor structure includes a semiconductor substrate with a source region and a drain region therein that are asymmetric. A gate dielectric structure includes a first gate oxide region over a portion of the source region, a second gate oxide region over a portion of the drain region, and a high dielectric constant (high-K) dielectric layer contacting the semiconductor substrate and separating the first gate oxide region from the second gate oxide region. A gate body is over the gate dielectric structure.
    Type: Application
    Filed: July 25, 2022
    Publication date: January 25, 2024
    Inventors: Saloni Chaurasia, Man Gu, Jagar Singh
  • Patent number: 11843034
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes a lateral bipolar junction transistor including an extrinsic base region and a bilayer dielectric spacer on sidewalls of the extrinsic base region, and a p-n junction positioned under the bilayer dielectric spacer between the extrinsic base region and at least an emitter region.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: December 12, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Man Gu, Haiting Wang, Jagar Singh
  • Publication number: 20230307238
    Abstract: Semiconductor structures include a channel region, a gate dielectric on the channel region, source and drain structures on opposite sides of the channel region, and a gate conductor between the source and drain structures on the gate dielectric. The source and drain structures include source and drain silicides. The gate conductor includes a gate conductor silicide. The gate conductor silicide is thicker than the source and drain silicides.
    Type: Application
    Filed: March 23, 2022
    Publication date: September 28, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: Jianwei Peng, Hong Yu, Man Gu, Eric S. Kozarsky
  • Publication number: 20230261088
    Abstract: Structures for a transistor and methods of forming a structure for a transistor. The structure includes a first dielectric spacer, a second dielectric spacer, and a gate laterally between the first dielectric spacer and the second dielectric spacer. The gate includes a first silicide layer extending from the first dielectric spacer to the second dielectric spacer. The structure further includes a second silicide layer within the first silicide layer, and a contact that is aligned to the second silicide layer.
    Type: Application
    Filed: February 11, 2022
    Publication date: August 17, 2023
    Inventors: Man Gu, Hong Yu, Jianwei Peng, Haiting Wang
  • Patent number: 11721722
    Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes a collector having a raised portion, an emitter having a raised portion, and a base laterally arranged between the raised portion of the emitter and the raised portion of the collector. The base includes an intrinsic base layer and an extrinsic base layer stacked with the intrinsic base layer. The structure further includes a stress liner positioned to overlap with the raised portion of the collector, the raised portion of the emitter, and the extrinsic base layer.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: August 8, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Jagar Singh, Haiting Wang, Jeffrey Johnson
  • Publication number: 20230238428
    Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.
    Type: Application
    Filed: January 24, 2022
    Publication date: July 27, 2023
    Inventors: Rong-Ting Liou, Man Gu, Jeffrey B. Johnson, Wang Zheng, Jagar Singh, Haiting Wang
  • Publication number: 20230146952
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistors with faceted raised source/drain regions and methods of manufacture. The structure includes: a substrate; a gate structure on the substrate; and faceted, raised source/drain regions adjacent to the gate structure and including at least two different semiconductor materials.
    Type: Application
    Filed: November 8, 2021
    Publication date: May 11, 2023
    Inventors: George R. MULFINGER, Matthew W. STOKER, Ryan W. SPORER, Man GU
  • Publication number: 20230062747
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes a lateral bipolar junction transistor including an extrinsic base region and a bilayer dielectric spacer on sidewalls of the extrinsic base region, and a p-n junction positioned under the bilayer dielectric spacer between the extrinsic base region and at least an emitter region.
    Type: Application
    Filed: November 17, 2021
    Publication date: March 2, 2023
    Inventors: Man Gu, Haiting Wang, Jagar Singh
  • Publication number: 20230063900
    Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes a collector having a raised portion, an emitter having a raised portion, and a base laterally arranged between the raised portion of the emitter and the raised portion of the collector. The base includes an intrinsic base layer and an extrinsic base layer stacked with the intrinsic base layer. The structure further includes a stress liner positioned to overlap with the raised portion of the collector, the raised portion of the emitter, and the extrinsic base layer.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 2, 2023
    Inventors: Man Gu, Jagar Singh, Haiting Wang, Jeffrey Johnson
  • Patent number: 11545575
    Abstract: An integrated circuit (IC) structure includes a semiconductor fin having a first longitudinal extent and a second longitudinal extent. The semiconductor fin has an upper fin portion having a uniform lateral dimension in the first longitudinal extent and the second longitudinal extent, a first subfin portion under the upper fin portion in the first longitudinal extent having a first lateral dimension, and a second subfin portion under the upper fin portion in the second longitudinal extent having a second lateral dimension different than the first lateral dimension. The second subfin may be used in a drain extension region of a laterally-diffused metal-oxide semiconductor (LDMOS) device. The second subfin reduces subfin current and improves HCI reliability, regardless of the type of LDMOS device.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: January 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Wenjun Li, Sudarshan Narayanan
  • Patent number: 11532745
    Abstract: Integrated circuit (IC) structures including asymmetric, recessed source and drain regions and methods for forming are provided. In an example, the IC structure includes a substrate, a gate structure over the substrate, first and second spacers contacting respective, opposite sidewalls of the gate structure, and source and drain regions on opposite sides of the gate structure. In one configuration, the source region includes an upper source portion having a first lateral width, and a lower source portion having a second lateral width greater than the first lateral width, and the drain region includes an upper drain portion having a third lateral width, and a lower drain portion having a fourth lateral width that is substantially the same as the third lateral width.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: December 20, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Wenjun Li
  • Patent number: 11410998
    Abstract: Integrated circuit (IC) structures including buried insulator layer and methods for forming are provided. In a non-limiting example, a IC structure includes: a substrate; a first fin over the substrate; a source region and a drain region in the first fin; a first gate structure and a second gate structure over the first fin, the first and the second gate structures positioned between the source region and the drain region; and a buried insulator layer including a portion disposed under the first fin.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: August 9, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Wenjun Li, Man Gu
  • Patent number: 11374002
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A semiconductor substrate includes a first region, a second region, and a first source/drain region in the first region. A semiconductor fin is located over the second region of the semiconductor substrate. The semiconductor fin extends laterally along a longitudinal axis to connect to the first region of the semiconductor substrate. The structure includes a second source/drain region including an epitaxial semiconductor layer coupled to the first semiconductor fin, and a gate structure that extends over the semiconductor fin. The gate structure includes a first sidewall and a second sidewall opposite the first sidewall, the first source/drain region is positioned adjacent to the first sidewall of the gate structure, and the second source/drain region is positioned adjacent to the second sidewall of the gate structure.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: June 28, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Wenjun Li, Man Gu
  • Patent number: 11289474
    Abstract: Structures including a passive device and methods of forming such structures. Multiple fins are positioned on a substrate, and an interconnect structure is positioned over the substrate. The fins contain a polycrystalline semiconductor material, and the interconnect structure includes a passive device that is positioned over the fins. The passive device may be, for example, an inductor or a transmission line.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: March 29, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Wang Zheng, Teng-Yin Lin, Halting Wang, Tung-Hsing Lee
  • Publication number: 20220052158
    Abstract: A FinFET includes a semiconductor fin, and a source region and a drain region in the same semiconductor fin. The drain region has a first fin height above a trench isolation; and the source region has a second fin height above the trench isolation. The first fin height is less than the second fin height. The FinFET may be used, for example, in a scaled laterally diffused metal-oxide semiconductor (LDMOS) application, and exhibits reduced parasitic capacitance for improved radio frequency (RF) performance. A drain extension region may have the first fin height, and a channel region may have the second fin height. A method of making the FinFET is also disclosed.
    Type: Application
    Filed: October 28, 2021
    Publication date: February 17, 2022
    Inventors: Man Gu, Wenjun Li
  • Patent number: 11239366
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure extends over a semiconductor body, a first source/drain region includes an epitaxial semiconductor layer on a first portion of the semiconductor body, and a second source/drain region is positioned in a second portion of the semiconductor body. The gate structure includes a first sidewall and a second sidewall opposite the first sidewall, the first source/drain region is positioned adjacent to the first sidewall of the gate structure, and the second source/drain region is positioned adjacent to the second sidewall of the gate structure. The first source/drain region has a first width, and the second source/drain region has a second width that is greater than the first width.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: February 1, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Wenjun Li, Man Gu, Baofu Zhu