Patents by Inventor Man-Heon Park

Man-Heon Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9411178
    Abstract: A substrate etching apparatus includes: a cassette to receive a substrate that has finished a previous process, and transfer the substrate; a first robot to take the substrate out of the cassette; a second robot to receive the substrate from the first robot and move the substrate mounted thereon vertically up and down; an etching cassette comprising a support to support the substrate and a holder to fix the substrate loaded from the second robot; a cassette fixing unit to fix at least one or more etching cassettes and being rotated at a pre-set angle to allow the substrate to be disposed perpendicular to the ground; and an etching unit to etch the substrate disposed perpendicular to the ground by the cassette fixing unit.
    Type: Grant
    Filed: September 25, 2012
    Date of Patent: August 9, 2016
    Assignee: LG Display Co., Ltd.
    Inventors: Sang Min Park, Eun Sub Lim, Won Seop Chun, Man Heon Park
  • Patent number: 8293065
    Abstract: A substrate etching apparatus includes: a cassette to receive a substrate that has finished a previous process, and transfer the substrate; a first robot to take the substrate out of the cassette; a second robot to receive the substrate from the first robot and move the substrate mounted thereon vertically up and down; an etching cassette comprising a support to support the substrate and a holder to fix the substrate loaded from the second robot; a cassette fixing unit to fix at least one or more etching cassettes and being rotated at a pre-set angle to allow the substrate to be disposed perpendicular to the ground; and an etching unit to etch the substrate disposed perpendicular to the ground by the cassette fixing unit.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: October 23, 2012
    Assignee: LG Display Co., Ltd.
    Inventors: Sang-Min Park, Eun-Sub Lim, Won-Seop Chun, Man-Heon Park
  • Publication number: 20080135176
    Abstract: A substrate etching apparatus includes: a cassette to receive a substrate that has finished a previous process, and transfer the substrate; a first robot to take the substrate out of the cassette; a second robot to receive the substrate from the first robot and move the substrate mounted thereon vertically up and down; an etching cassette comprising a support to support the substrate and a holder to fix the substrate loaded from the second robot; a cassette fixing unit to fix at least one or more etching cassettes and being rotated at a pre-set angle to allow the substrate to be disposed perpendicular to the ground; and an etching unit to etch the substrate disposed perpendicular to the ground by the cassette fixing unit.
    Type: Application
    Filed: December 7, 2007
    Publication date: June 12, 2008
    Inventors: Sang-Min Park, Eun-Sub Lim, Won-Seop Chun, Man-Heon Park