Abstract: Disclosed are a substrate processing method and a substrate processing apparatus. The substrate processing method of etching a thin film formed on a substrate in units of atomic layers includes a modifying step of supplying a modifying gas to a processing space in a chamber accommodating the substrate to modify a surface of the thin film and form a modified film having a first thickness, a surface adsorption step of supplying a precursor to the processing space to adsorb the precursor to the modified surface of the thin film, and an etching step of supplying heat to the substrate adsorbed with the precursor to etch the modified surface of the thin film adsorbed with the precursor. The surface adsorption step and the etching step are repeatedly performed multiple times until the modified film having the first thickness is etched.

Abstract: Disclosed are a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a chamber including a processing space defined therein, a substrate support unit configured to support a substrate in the processing space, a microwave unit configured to supply microwaves to the processing space, a window member disposed below the microwave unit and configured to transmit the microwaves supplied from the microwave unit, a heat transfer plate disposed in the processing space so as to be spaced a predetermined distance from the window member and configured to be heated by the microwaves supplied to the processing space and to transfer heat to the substrate, and a controller configured to control the microwave unit.

Abstract: A dishwasher includes a tub, a door, and a drying device disposed outside the tub. The drying device includes a condensing duct that faces an outer surface of the tub, that is in fluid communication with an inlet port defined at the tub, and that extends in a vertical direction and a first direction intersecting the vertical direction, and a fan configured to cause a flow of air in the condensing duct. The condensing duct includes an upstream portion in fluid communication with the inlet port, a downstream portion that is in fluid communication with the upstream portion and includes a bent portion disposed below the upstream portion, and a rib that is disposed inside the bent portion and extends across the bent portion, where the rib protrudes in a second direction that intersects the vertical direction and the first direction.

Abstract: Provided are a method and system of analyzing ingredients of an artificial rainfall for verification of a cloud seeding effect. As the method and system, which can verify an effect of the artificial rainfall in such a manner that a seeding material becomes different according to each temperature of clouds at a seeding altitude, water sampling from precipitation is performed before and after seeding, and thus the ingredients of a water sample are analyzed using each of a method of analyzing a heavy metal component and a method of analyzing a water-soluble ion component according to a cool cloud and a warm cloud so that whether or not there is a change in each concentration of the ingredients can be determined, are provided, an experiment for the artificial rainfall can more effectively be performed.

Abstract: A camera module includes: a housing; a first dynamic component movably disposed in the housing in a direction of an optical axis; a second dynamic component including a lens and movably disposed on the first dynamic component in a direction orthogonal to the optical axis; a pocket configured in either one or both of the first dynamic component and the second dynamic component; a damping gel disposed in the pocket; and a damping pin extending from the first moving body or the second moving body, and at least partially embedded in the damping gel.

Abstract: The disclosure provides a surgical apparatus comprising: a steerable member that is bendable and comprises a plurality of bending segments with channels therein; and a plurality of bending actuation wires that are arranged to pass through the steerable member and cause the steerable member to bend, the steerable member comprising at least one outwardly opening lumen through which the bending actuation wires pass.

Abstract: One embodiment provides a gas diffusion layer for a fuel cell constituting a unit cell of the fuel cell. The gas diffusion layer includes a base layer that includes short carbon fibers and has a reinforcing portion formed in a predetermined area thereof in a thickness direction with continuous carbon fibers oriented in the reinforcing portion. The reinforcing portion is formed adjacent to a first surface of the base layer. A micro porous layer is formed on the first surface of the base layer.

Abstract: A floor module for a vehicle includes a plurality of tile portions configured to cover a vehicle floor of a vehicle and sequentially aligned by being coupled in a transverse direction, a plurality of fixing portions provided below the tile portions, connected to the tile portions in an upward and downward direction, and sequentially aligned by being coupled in the transverse direction, and a plurality of mounting portions provided above the vehicle floor and configured to support the tile portions and the fixing portions from below by being connected to the fixing portions in the upward and downward direction in a state in which the tile portions and the fixing portions are matched.

Abstract: A fuel cell system includes a fuel cell stack that generates power by using a reactive gas, and a controller operatively connected to the fuel cell stack and performing a catalyst refresh operation on the fuel cell stack. The controller is configured to determine whether to perform the catalyst refresh operation, by calculating an oxide film amount for the fuel cell stack, to update at least part of parameters used to calculate the oxide film amount based on a state of the fuel cell stack, and to use the updated parameter so as to calculate the oxide film amount.

Abstract: A dishwasher includes a tub, a door, and a drying device configured to supply air to a washing space in the tub. The drying device includes a condensing duct disposed outside the tub, a cold air supply module that is disposed outside the tub and defines a heat exchange flow path part adjoining the condensing duct, and a fan configured to cause air flow in the condensing duct. The condensing duct includes an upstream portion communicating with the inlet port and extending above the inlet port and then downward, and a heat exchange portion connected to the upstream portion and extending downward to the heat exchange flow path part. A height of an upper end of the heat exchange flow path part is equal to or larger than a height of a lower end of the inlet port.

Abstract: Provided herein is a surgical instrument comprising a cap having a first and second aperture extending therethrough, a first extendable and retractable member having a distal end coupled to a first coupling, a first arm extending from the first coupling and pivotable with respect to the distal end of the first member, and a second arm connected to the first arm through a second coupling and pivotable, with respect to the first arm, a second extendable and retractable member having a distal end coupled to a third coupling, a third arm extending from the second coupling, the third arm pivotable, with respect to the distal end of the second member, and a fourth arm connected to the third arm through a fourth coupling and pivotable, with respect to the third arm, a first end effector connected to the second arm and a second end effector connected to the fourth arm.

Abstract: The disclosure provides a surgical apparatus comprising: a steerable member that is bendable and comprises a plurality of bending segments with channels therein; and a plurality of bending actuation wires that are arranged to pass through the steerable member and cause the steerable member to bend, the steerable member comprising at least one outwardly opening lumen through which the bending actuation wires pass.

Abstract: The present disclosure relates to an air barrier system II for blocking inflow of fog. According to the present disclosure, provided is an air barrier system which does not affect wind load while effectively preventing fog from flowing toward a road.

Abstract: There are a method and a system for extracting a region of interest in an image obtained through a high-resolution camera installed in an autonomous vehicle. The method for extracting the region of interest based on a drivable region in the high-resolution camera includes a step of acquiring an image through the high-resolution camera; and a step of extracting, by a processor, a region of interest within the acquired image by using 3D drivable region information. Accordingly, far-distance information extraction performance may be enhanced, and all of the functions of a set of a wide angle camera and a narrow angle camera of HD may be performed only with one FHD or UHD wide angle camera, so that the number of sensors may be reduced and a production cost may be reduced.

Abstract: There is a method for verifying accuracy of a virtual sensor model for simulation based on reality information data. According to an embodiment, a virtual sensor verification method may acquire information on positions and states of real vehicles which are running on a real road, may acquire real sensor data generated in real sensors of a reality information acquisition vehicle from among the real vehicles, may reproduce the real vehicles on a virtual road as virtual vehicles, based on the acquired information on the positions and states, may acquire virtual sensor data outputted from virtual sensors mounted in a virtual information acquisition vehicle from among the virtual vehicles, and may verify the virtual sensors by comparing the acquired real sensor data and the virtual sensor data.

Abstract: There are provided a scenario similarity retrieval-based automatic scenario generation system and method. According to an embodiment, a scenario retrieval-based automatic scenario generation method includes: retrieving scenarios similar to a query scenario from a scenario DB for an autonomous driving test; filtering only scenarios that meet a selection condition from the retrieved scenarios; and converting components of the filtered scenarios to suit a target condition. Accordingly, a desired scenario may be automatically generated by retrieving a scenario similar to a targeted scenario, converting the retrieved scenario, and concretizing the scenario.

Abstract: An embodiment antioxidant liquid for a fuel cell is provided. The antioxidant liquid is to be charged in a gas diffusion layer of a fuel cell stack, and the antioxidant liquid includes a solvent, an oxide as a first antioxidant dispersed in the solvent, and a salt as a second antioxidant dissolved in the solvent.

Abstract: Provided is an Internet-of-Things patch-type sensor device and a sensing information monitoring system and a sensing information monitoring method using same, which can easily obtain sensing information from an object to be measured, such as a human body or a thing, and check state changes of the object to be measured by using the sensing information. The Internet-of-Things patch-type sensor device includes: a lower plate unit detachably coupled to an object to be measured; a control panel unit stacked and fixed on the top of the lower plate unit; and a top plate unit stacked and fixed on the top of the control panel unit.

Abstract: A method for manufacturing a gas diffusion layer for a fuel cell wherein carbon nanotubes are impregnated into Korean paper, thereby enhancing electroconductivity, and a gas diffusion layer manufactured thereby. The method for manufacturing a gas diffusion layer for a fuel cell which is to manufacture a gas diffusion layer as a constituent member of a unit cell in a fuel cell, includes a support preparation step of preparing a support with Korean paper; a dispersion preparation step of dispersing a carbon substance in a solvent to form a dispersion, a coating step of coating the support with the dispersion, and a thermal treatment step of thermally treating the dispersion-coated support to fix the carbon substance to the support.

Abstract: An air mobility device improves propulsion due to the Coand? effect when flying so as to increase a flying range and reduces noise when flying.