Patents by Inventor Man Soo JANG

Man Soo JANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus and vacuum processing method using the same
    Patent number: 12288709
    Abstract: A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.
    Type: Grant
    Filed: March 2, 2022
    Date of Patent: April 29, 2025
    Assignees: SAMSUNG DISPLAY CO., LTD., ULVAC, INC.
    Inventors: Kyung Hoon Chung, Masao Nishiguchi, Daisuke Iwase, Ki Jun Roh, Man Soo Jang
  • VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD USING THE SAME
    Publication number: 20220285179
    Abstract: A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.
    Type: Application
    Filed: March 2, 2022
    Publication date: September 8, 2022
    Inventors: Kyung Hoon CHUNG, Masao NISHIGUCHI, Daisuke IWASE, Ki Jun ROH, Man Soo JANG