Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.

Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Abstract: A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.

Abstract: A piezoelectric element with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film, and a method of forming same. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film has a predetermined thickness and is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

Abstract: A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

Abstract: A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

Abstract: A magnetic azimuth measurement apparatus without arithmetic means nor any mechanical motion such as rotation, not affecting its mass production ability because of a simple configuration, and making it possible to measure a azimuth in higher precision, is provided. A trigger signal generates if a condition determining circuit detects that a switched output signal reaches a maximum (positive peak), and this trigger signal enables an output interface circuit to hold a switching signal. The switching signal held by the output interface circuit is a digital representation of a detection coil position parallel to an external magnetic field. Accordingly, it is possible to obtain the azimuth of the external magnetic field with respect to the sensor device.

Abstract: A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

Abstract: A magnetic azimuth measurement apparatus without arithmetic means nor any mechanical motion such as rotation, not affecting its mass production ability because of a simple configuration, and making it possible to measure a azimuth in higher precision, is provided. A trigger signal generates if a condition determining circuit detects that a switched output signal reaches a maximum (positive peak), and this trigger signal enables an output interface circuit to hold a switching signal. The switching signal held by the output interface circuit is a digital representation of a detection coil position parallel to an external magnetic field. Accordingly, it is possible to obtain the azimuth of the external magnetic field with respect to the sensor device.

Abstract: A magnetic sensor includes an elongated magnetic core and a coil wound on the periphery of the magnetic core so as to detect a magnetic field based on the change of inductance of the coil with high sensitivity and without increasing the number of turns of the coil. The number of turns of the coil in the central part of the magnetic core is larger than that of the coil at the end parts of the magnetic core. Thus, a bias field due to a bias current supplied to the coil is efficiently applied to the magnetic core. As a result, the inductance of the coil can be set to a large value without increasing the number of turns of the coil and a high sensitivity can be obtained.

Abstract: A magnetic detection apparatus is disclosed, the size and cost of which can easily be reduced and with which excellent sensitivity can be obtained. The magnetic detection apparatus according to the present invention has a magnetic sensor formed by winding a coil around a magnetic member, wherein change in a response waveform of an electric current allowed to flow in the coil of the magnetic sensor occurring when time-varying voltage is applied to the coil is detected. Since the response waveform of the electric current allowed to flow in the coil is changed in accordance with the intensity of an external magnetic field, the external magnetic field can be detected.