Patents by Inventor Manabu Hamono

Manabu Hamono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR WAFER CARRIER BLADE
    Publication number: 20090169346
    Abstract: A carrier blade for transferring a semiconductor wafers into and out of a deposition chamber may include transition surfaces sloping downward from ledge surfaces. The transition surfaces slope from the corresponding ledges at angles that are greater than about 90 degrees so that the edges between the ledge surfaces and the transition surfaces are not sharp. The carrier blade may include bevels extending from the ledge surface(s) to upper lateral edges of the carrier blade.
    Type: Application
    Filed: December 31, 2007
    Publication date: July 2, 2009
    Applicant: MEMC ELECTRONIC MATERIALS, INC.
    Inventors: Manabu Hamono, John A. Pitney, Lance G. Hellwig