Abstract: To provide a surface light source prober apparatus which is capable of detecting a point defect on a pixel which can not be detected by a prior art and enhancing the inspection precision and reducing the cost of inspection, a surface light source prober apparatus of the present invention uses a D.C. light source for irradiating the entire surface of an LCD substrate to be inspected which is placed on a stage with a D.C. light. A polarization shutter is switched for transmitting or intercepting the D.C. light from the D.C. light source, which is incident upon the LCD substrate; a probe is used for applying a voltage upon a terminal of the LCD substrate to accumulate electrostatic charge on an auxiliary capacitor of a pixel of the LCD substrate and for reading the accumulated charge. The shutter is controlled so that the entire surface of the LCD substrate to be inspected is irradiated with the D.C. light from the D.C. light source via the polarization shutter.

Abstract: A probe device that includes a plurality of actuators respectively associated with a plurality of probe units. The probe device is adaptive to various display panels each having electrode terminals arranged at a particular pitch, without resorting to additional probe units. The probe device is therefore feasible for general-purpose applications and low in operation cost. In addition, the probe device allows electrode terminals and probes to be accurately aligned with each other. This enhances accurate testing, surely excludes defective products, and frees the subsequent steps from wasteful cost. A method of positioning the probes is also disclosed.

Abstract: A substrate cassette with a receiving frame having support plates formed integrally therewith. The support plates minimize the deformation of substrates loaded in the cassette and ascribable to their own weights. Hemispherical lugs are formed on each support plate in order to protect the rear of the substrates from scratches.