Patents by Inventor Manabu Kotaka

Manabu Kotaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor head for crystal oscillator type of film thickness monitor
    Patent number: 10767987
    Abstract: A sensor head has: a sensor head main body which has disposed therein the stepping motor; a holder which has disposed on an upper surface thereof a plurality of crystal oscillators and which is driven for rotation by the stepping motor; and a mask body which is mounted on the sensor head main body so as to cover an upper surface of the holder and which has opened therein a film-forming window faced by one of the crystal oscillators. The sensor head also has: a first electrode fixed to that portion of the sensor head main body which is located right under the film-forming window; and second electrodes which are in electrical conduction with each of the crystal oscillators and which are disposed to protrude under a lower surface of the holder.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: September 8, 2020
    Assignee: ULVAC, INC.
    Inventors: Yousuke Oguma, Akihiro Maeda, Yuki Kaida, Manabu Kotaka, Kou Okamura
  • Sensor Head for Crystal Oscillator Type of Film Thickness Monitor
    Publication number: 20200103225
    Abstract: A sensor head has: a sensor head main body which has disposed therein the stepping motor; a holder which has disposed on an upper surface thereof a plurality of crystal oscillators and which is driven for rotation by the stepping motor; and a mask body which is mounted on the sensor head main body so as to cover an upper surface of the holder and which has opened therein a film-forming window faced by one of the crystal oscillators. The sensor head also has: a first electrode fixed to that portion of the sensor head main body which is located right under the film-forming window; and second electrodes which are in electrical conduction with each of the crystal oscillators and which are disposed to protrude under a lower surface of the holder.
    Type: Application
    Filed: March 6, 2018
    Publication date: April 2, 2020
    Applicant: ULVAC, INC.
    Inventors: Yousuke Oguma, Akihiro Maeda, Yuki Kaida, Manabu Kotaka, Kou Okamura
  • Mixing device
    Patent number: D814046
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: March 27, 2018
    Assignee: ULVAC, Inc.
    Inventors: Tomomitsu Ozeki, Manabu Kotaka, Akihiro Maeda, Yuki Yoshimura