Abstract: A plasma processing apparatus includes a microwave-absorbing heat-generating member disposed along an inside surface of a plasma processing chamber to absorb microwaves and generate heat, wherein the microwave-absorbing heat-generating member is heated by microwaves without exciting plasma, and wherein, after that, a substrate to be processed is loaded into the plasma processing chamber and then plasma is excited to process the substrate.

Abstract: A plasma processing apparatus is disclosed which comprises a container which can be evacuated; a gas supply means for supplying a gas to the inside of the container; and a microwave supply means for supplying microwaves to generate a plasma in the container, the plasma being utilized to process an article, wherein the microwave supply means is a microwave applicator which is provided with an annular waveguide having a planar H-plane with a plurality of slots provided apart from each other and a rectangular cross section perpendicular to the traveling direction of microwaves and which supplies microwaves to the inside of the container through a dielectric window of the container from the plurality of slots provided in the planar H-plane, and wherein the gas supply means is provided a gas emission port through which the gas is emitted toward the planar H-plane.

Abstract: A drain current of an FET (4) is controlled to control an output of a buzzer (11), and a gate voltage of the FET (4) is controlled by an operational amplifier (3) for changing a source output of the FET (4) into an inverted input. By such a negative feedback circuit structure, a path for controlling a buzzer output is set to be one system and stability of the buzzer output can be enhanced. A variable power supply (2) for changing an output in accordance with control data of a logic section (1) is set to be a non-inverted input of the operational amplifier (3). Consequently, it is possible to obtain a circuit structure which does not depend on the number of bits of the control data.

Abstract: A drain current of an FET (4) is controlled to control an output of a buzzer (11), and a gate voltage of the FET (4) is controlled by an operational amplifier (3) for changing a source output of the FET (4) into an inverted input. By such a negative feedback circuit structure, a path for controlling a buzzer output is set to be one system and stability of the buzzer output can be enhanced. A variable power supply (2) for changing an output in accordance with control data of a logic section (1) is set to be a non-inverted input of the operational amplifier (3). Consequently, it is possible to obtain a circuit structure which does not depend on the number of bits of the control data.

Abstract: A microcomputer is provided in an earphone-microphone device for the purpose of controlling the transmission/receipt of data with respect to a portable cellular phone by way of a serial data signal line and a serial clock signal line, the operation of a liquid crystal device driver, and the operation of a drive circuit of a vibrator. As a result, an earphone-microphone device itself can perform typical functions of the cellular phone, such as retrieval of phone-number-related data stored in the cellular phone, displaying of the thus-retrieved data, origination of a call to the called party indicated on a display, and actuation of the vibrator when there is an arrival of an incoming call.

Abstract: A substrate rotating device includes a turn table placed horizontally, a substrate supporting member provided on the turn table, for supporting a substrate with respect to a vertical direction and for regulating the position of the outside periphery of the substrate with respect to a horizontal direction, a driving mechanism causing rotation of the turn table, an opening formed in the turn table, and an evacuating mechanism rotatable as a unit with the turn table, for forcibly evacuating a space between the turn table and the substrate through the opening,

Abstract: A ball game apparatus has a plurality of balls, a spiral rail for automatically delivering the balls, a field portion on which the balls delivered by the spiral rail can roll with a given degree of freedom, winning pocket portions and invalid pockets formed over the field portion for receiving a plurality of the balls in each of them, a CCD camera for counting the number of balls received in the winning pocket portions and a calculator for calculating a score from the number of balls counted by the CCD camera.