Abstract: The present invention provides a method of manufacturing a semiconductor device which comprises an upper and a lower film each having a wire, and a plurality of pellets each mounted on each of the upper and lower films, where the upper and lower films are electrically connected to each other. The method includes a discriminating step for discriminating common films, each having the wire in a common pattern and the pellet electrically connected to the wire, between a conforming item and a defective item in accordance with each of a plurality of discrimination conditions, and a cutting step for selectively cutting the wires on the common films determined to be conforming items in accordance with each of the discrimination conditions, along different cutting lines to form the upper and lower films which differ in the wiring pattern.

Abstract: A positioning apparatus includes a machine bench 1, an external pressure linear bearing assembly 2 and a slide body 3 mounted on the machine bench 1 through the bearing assembly 2 for reciprocating movement relative to the machine bench. The positioning apparatus has a frictional reciprocating drive mechanism 4 for reciprocatingly driving the slide body 3 which is provided and includes a main shaft 5 adapted to be rotated, and a plurality of rollers 9 disposed around the main shaft 5 and inclined at a predetermined angle relative to the main shaft 5. Each roller 9 is pressed relative to the main shaft 5 by a pressing member 15. The slide 3 and a rail 20 are made of ceramics. Magnets 41 are provided on the slide body 3 for developing forces of magnetic attraction between magnetizable members 42, provided on the machine bench 1, and the slide body 3.

Abstract: An X-Y table produces no dust and maintains a high positioning accuracy. Slide blocks are slidably mounted on an x-axis bar guide and a y-axis bar guide through air bearings. They are moved along the respective bar guides by linear motors. A sub-bar guide is fixed to one end of the slide block supported on the x-axis bar guide. It extends through a hole formed in a stage to slidably support the stage through an air bearing. Another sub-bar guide has its one end fixed to the stage and extends through a hole formed in the slide block supported on the y-axis bar guide to slidably support it through an air bearing. The x-axis motor has a yoke having a top surface opposite the bottom surface of the stage. Permanent magnets provided on the bottom surface of the stage attracts the top surface of the yoke.