Abstract: A substrate processing apparatus includes a drying unit for replacing a liquid film formed on a substrate with a supercritical fluid to dry the substrate, and a control device. The drying unit includes a pressure container, a supply mechanism for supplying fluid to the pressure container, a discharge mechanism for discharging the fluid from the pressure container, a panel for separating an internal space from an external space, an electromagnetic lock, and a concentration sensor for detecting a concentration of the fluid. An unlocking condition for the control device to switch a state of the electromagnetic lock from a locked state to an unlocked state includes a condition that a detection value of the pressure sensor is less than or equal to a first threshold value and a condition that a detection value of the concentration sensor is less than or equal to a second threshold value.

Abstract: The present invention is a banking system comprises a borrowing application section, a borrowing information acquiring section that acquires information about the borrowing money permitted by a cashing service dealer, a transaction instruction inputting section that inputs an instruction to carry out a transaction relevant to the financial institution using at least a part of the borrowing money, and a financial transaction instruction section that, when the borrowing information acquiring section acquires the borrowing information, gives an instruction about the transaction relevant to the financial institution using at least a part of the borrowing money to a banking host machine in accordance with the instruction input by the transaction instruction inputting section; thereby, user-friendliness of the machine is increased and the ratio of machine failures is reduced.

Abstract: The present invention is a banking system comprises a borrowing application section, a borrowing information acquiring section that acquires information about the borrowing money permitted by a cashing service dealer, a transaction instruction inputting section that inputs an instruction to carry out a transaction relevant to the financial institution using at least a part of the borrowing money, and a financial transaction instruction section that, when the borrowing information acquiring section acquires the borrowing information, gives an instruction about the transaction relevant to the financial institution using at least a part of the borrowing money to a banking host machine in accordance with the instruction input by the transaction instruction inputting section; thereby, user-friendliness of the machine is increased and the ratio of machine failures is reduced.