Abstract: An arm unit of a transfer robot includes an R-axis motor configured to relatively rotate a second arm with respect to a first arm. The R-axis motor is fixed to the first arm so as to protrude to below an arm axis holding portion of the first arm with an output shaft thereof facing upward. The output shaft is configured to penetrate the first arm from below. The output shaft is fixed to the second arm by a shaft fixing portion.

Abstract: A gate valve that opens or closes opening parts of a valve box with a valve plate includes a valve rod that moves upward or downward and tilt inside the valve box; a drive mechanism that moves the valve rod upward or downward by a predetermined stroke and tilts the valve rod; a stopper mechanism that includes a spring return type stopper pin, and in which, when compressed air is supplied, a pin rod of the stopper pin moves forward in a horizontal direction, and a cam plate connected to the valve rod or a load receiving roller attached to the cam plate collides with the pin rod to regulate an upward movement of the valve rod. When the supply of the compressed air is stopped, the pin rod moves backward in the horizontal direction due to a reaction force of the spring, so that the cam plate or the load receiving roller does not collide with the pin rod and the regulation on the upward movement of the valve rod is released; and a vibration reducing device that reduces vibration.

Abstract: A gate valve that opens or closes opening parts of a valve box with a valve plate includes a valve rod that moves upward or downward and tilt inside the valve box; a drive mechanism that moves the valve rod upward or downward by a predetermined stroke and tilts the valve rod; a stopper mechanism that includes a spring return type stopper pin, and in which, when compressed air is supplied, a pin rod of the stopper pin moves forward in a horizontal direction, and a cam plate connected to the valve rod or a load receiving roller attached to the cam plate collides with the pin rod to regulate an upward movement of the valve rod. When the supply of the compressed air is stopped, the pin rod moves backward in the horizontal direction due to a reaction force of the spring, so that the cam plate or the load receiving roller does not collide with the pin rod and the regulation on the upward movement of the valve rod is released; and a vibration reducing device that reduces vibration.

Abstract: A panel (1) for a plasma display includes a substrate (2). Linear first ribs (31) each extending in the y direction are arranged in the x direction perpendicular to the y direction on a main surface of the substrate (2) at a predetermined pitch. Linear second ribs (32) each extending in the x direction are arranged in the y direction on the main surface of the substrate (2) at a predetermined pitch. A clearance (4) exists between each of the second ribs (32) and the substrate (2) in a space formed by two adjacent ones of the first ribs (31). Two adjacent cells arranged in the y direction are continuous through the clearance (4). Thus, it is possible to supply a light emitting material, and feed gas necessary for light emission, to each cell using the clearance (4) in a suitable manner in the panel (1).

Abstract: Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.

Abstract: A pattern forming apparatus (1) comprises an ejection part (41) for ejecting a patterning material to a main surface of a substrate (9) from a plurality of outlets. The ejection part (41) moves relative to the substrate (9) in a direction along the main surface of the substrate (9) by a stage moving mechanism (2) and a plurality of linear pattern elements are formed on the substrate (9). In forming the linear pattern elements, moving speed of the plurality of outlets relative to the substrate (9) is changed periodically by an outlets moving mechanism (44) and gnarl portions each of which spreads in a direction perpendicular to a direction extending the linear pattern elements (91) are formed in each linear pattern element (91). This makes it possible to form a pattern similar to parallel crosses on the substrate 9 appropriately while ejecting the patterning material from the plurality of outlets.

Abstract: In a barrier-rib forming apparatus for forming barrier ribs on a substrate by discharging rib material from a discharge part, an oscillating mechanism for oscillating the discharge part in a direction perpendicular to a traveling direction of a stage which supports the substrate is provided to form barrier ribs of waveform on the substrate. The travel of the stage is performed twice, and at the second travel of the stage, each of barrier ribs is formed between adjacent ones of the already-formed barrier ribs. The barrier rib formed at the first travel of the stage and that formed at the second travel of the stage are disposed symmetrically to each other with respect to an axis parallel to the travel direction of the stage. With this formation of barrier ribs, it is possible to manufacture a panel which allows improvement in luminance of a plasma display.

Abstract: A panel (1) for a plasma display includes a substrate (2). Linear first ribs (31) each extending in the y direction are arranged in the x direction perpendicular to the y direction on a main surface of the substrate (2) at a predetermined pitch. Linear second ribs (32) each extending in the x direction are arranged in the y direction on the main surface of the substrate (2) at a predetermined pitch. A clearance (4) exists between each of the second ribs (32) and the substrate (2) in a space formed by two adjacent ones of the first ribs (31). Two adjacent cells arranged in the y direction are continuous through the clearance (4). Thus, it is possible to supply a light emitting material, and feed gas necessary for light emission, to each cell using the clearance (4) in a suitable manner in the panel (1).

Abstract: A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve rod, which is equipped with the valve plate with the pair of valve plate surfaces, is rotatably supported, and raised and lowered by a raising/lowering cylinder, the valve rod being tilted by an actuator, a combination of a cam member and a cam raising/lowering cylinder, a combination of a driving block and a cylinder, or a combination of a connection member and a driving device (not shown) to thereby effect valve opening/closing with the pair of valve plate surfaces.

Abstract: A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve rod, which is equipped with the valve plate with the pair of valve plate surfaces, is rotatably supported, and raised and lowered by a raising/lowering cylinder, the valve rod being tilted by an actuator, a combination of a cam member and a cam raising/lowering cylinder, a combination of a driving block and a cylinder, or a combination of a connection member and a driving device (not shown) to thereby effect valve opening/closing with the pair of valve plate surfaces.

Abstract: On a substrate (9) on which barrier ribs (91) are formed, a nozzle (71) is inserted between the barrier ribs (91) and discharges a phosphor paste (92). The nozzle (71) has a slit (712) in a direction orthogonal to a traveling direction and the phosphor paste (92) is discharged from the slit (712) towards a bottom surface and side surfaces of a valley between the barrier ribs (91). The phosphor paste (92) after the discharge is shaped by a rear portion (713) of a tip of the nozzle (71) and applied to the bottom surface and side surfaces of the valley to have an appropriate thickness.

Abstract: In a barrier-rib forming apparatus 1 for forming barrier ribs on a substrate 9 by discharging rib material from a discharge part 52, an oscillating mechanism 4 for oscillating the discharge part 52 in a direction perpendicular to a traveling direction of a stage 3 which supports the substrate 9 is provided to form barrier ribs of waveform on the substrate 9. The travel of the stage 3 is performed twice, and at the second travel of the stage 3, each of barrier ribs is formed between adjacent ones of the already-formed barrier ribs. The barrier rib formed at the first travel of the stage 3 and that formed at the second travel of the stage 3 are disposed symmetrically to each other with respect to an axis parallel to the travel direction of the stage 3. With this formation of barrier ribs, it is possible to manufacture a panel which allows improvement in luminance of a plasma display.

Abstract: A method of forming barrier ribs on a back plate for use in a flat panel display. The method includes a step of delivering a rib material from a nozzle and leveling surfaces of the barrier ribs while moving the nozzle and back plate relative to each other.

Abstract: A gate valve according to the present invention including a first valve plate having a valve opening, a second valve plate connected to the first valve plate via first bellows, and an actuator provided between the first valve plate and the second valve plate, wherein the first valve plate is moved by the operation of the actuator, thereby enabling the valve plate, a valve rod, and the like to be made small and lightweight.

Abstract: A rib material is delivered to a back plate from a direction tilted forward with respect to a direction of movement of a nozzle relative to the back plate. This delivery mode applies a horizontal velocity component to the rib material in a direction corresponding to the direction of movement of the nozzle relative to the back plate. A velocity difference between the horizontal velocity component of the rib material and a relative moving velocity component of the back plate resulting from the relative movement between the nozzle and back plate is reduced for equalization. This suppresses deformation of the rib material delivered, thereby depositing the rib material on the back plate in a desired shape determined by discharge openings of the nozzle. Barrier ribs are thereby formed with high accuracy.

Abstract: A gate valve according to the present invention comprises a first valve plate having a valve openings, a second valve plate connected to the first valve plate via first bellows, and an actuator provided between the first valve plate and the second valve plate, wherein the first valve plate is moved by the operation of the actuator, thereby enabling the valve plate, a valve rod, and the like to be made small and lightweight.

Abstract: Barrier ribs are formed on a back plate moved while a rib material is delivered thereto from a nozzle. Immediately after the rib material is delivered from the nozzle to the back plate, the rib material is irradiated with light to promote curing of the rib material. By promoting curing of the rib material with light emitted immediately after delivery of the rib material, the rib material delivered linearly to the back plate is maintained in shape. The rib forming process is thereby simplified to form barrier ribs with high quality and high accuracy. The rib material is used efficiently to achieve low cost. Besides, the barrier ribs may be formed to have a high aspect ratio.

Abstract: A film dissolving liquid is ejected from a needle-shaped nozzle onto a peripheral edge portion of a substrate surface of a SOG film, while being subjected to the film dissolving liquid. The substrate is rotated in order to dissolve and remove the SOG film from the peripheral edge portion of the substrate. The film dissolving liquid is a solvent or mixture of two or more solvents selected from the group cyclohexanone, .gamma.-butyrolactone, ethyl lactate or ethyl pyruvate. As a result, a swelling of the SOG film is not created at the edge portion of the substrate. A crack is not therefore created at the edge portion of the SOG film, and generation of particles due to a damage at the film swelling portion thereof is prevented.

Abstract: In a method and an apparatus for manufacturing a semiconductor integrated circuit, including a wafer test process, an assembling process and a sorting process, electric characteristics of a plurality of semiconductor integrated circuits formed on a wafer, is measured, and then stored in a memory means together with data of the position of each semiconductor integrated circuit. The plurality of semiconductor integrated circuits on the wafer are cut into individual semiconductor integrated circuit chips.

Abstract: A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.