Patents by Inventor Manfred Helmut Gustav Schrenk

Manfred Helmut Gustav Schrenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor for use in a lithographic apparatus
    Publication number: 20070108377
    Abstract: A sensor for use at substrate level in a high numerical aperture lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The improved coupling elements include a flowing liquid medium disposed between the transparent plate and the sensing element.
    Type: Application
    Filed: November 2, 2006
    Publication date: May 17, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Haico Kok, Marcus Van De Kerkhof, Borgert Kruizinga, Timotheus Sengers, Bearrach Moest, Marc Antonius Haast, Peter Weissbrodt, Manfred Helmut Gustav Schrenk, Torsten Harzendorf