Patents by Inventor Manfred Helmut Gustav Wilhelm Johannes Schrenk

Manfred Helmut Gustav Wilhelm Johannes Schrenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and sensor therefor
    Patent number: 8629418
    Abstract: A sensor for use at substrate level in a high numerical aperture lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The improved coupling elements include a flowing liquid medium disposed between the transparent plate and the sensing element.
    Type: Grant
    Filed: November 2, 2006
    Date of Patent: January 14, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Marcus Adrianus Van De Kerkhof, Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast, Peter Werner Weissbrodt, Manfred Helmut Gustav Wilhelm Johannes Schrenk, Torsten Harzendorf