Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

Abstract: A device for homogenizing laser radiation has at least in a first direction perpendicular to a direction of propagation of the laser radiation partial beams spaced apart from each other, in particular for homogenizing laser radiation emanating from a laser diode bar, an array of refractive surfaces, which can deflect at least a majority of the partial beams of the laser radiation to be homogenized in such different manners that the beams run at least partially more convergingly to each other after passing through the refractive surfaces than before passing through the refractive surfaces. The device further has a lens device through which the partial beams, which have passed the array of refractive surfaces, can pass, wherein the lens device can superimpose at least some of the partial beams in a working plane.

Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.