Abstract: The invention relates to a flat coil and to a lthographic method for producing microcomponents with metal component sources in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produe the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided.

Abstract: A gas passage (1) with a selectively acting penetration surface consisting of quartz, quartz glass, Pyrex glass or the like; in order to provide penetration surfaces which are relatively thin on the one hand but will withstand relatively great pressure differences on the other, it is proposed that the selectively acting penetration surface take the form of a plurality of adjacent windows (5).

Abstract: A process for producing a ceramic having a microstructured surface with a surface profile depth of less than 1 micron, measured by the atomic force microscopy, comprising preparing a polymeric precursor material, shaping the precursor material into a structured mold insert of an inherently stable mold insert material having a structured surface geometry corresponding with the microstructured surface of the ceramic to form a shaped precursor material, the shaped precursor material being rendered infusible by chemical crosslinking, and wherein the inherently stable mold insert material is selected from materials having sufficient strength for structuring and high molding accuracy, and pyrolyzing the shaped precursor material, whereby the ceramic having the microstructured surface is obtained.

Abstract: A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.