Abstract: A method for monitoring the operation of a capacitive pressure measuring cell which has a measuring capacitor (CM) and a reference capacitor (CR) is disclosed, where an internal excitation voltage UE0 is applied in the form of an alternating square-wave signal, and the pressure measured value p is obtained from the capacitance values of the measuring capacitor (CM) and the reference capacitor (CR). The excitation voltage UE0 is converted into a voltage signal UCOM by integration, with additional voltage values being acquired over time such that the value of the voltage signal UCOM is indicative of an external influence of either an electromagnetic and/or low-frequency nature or a resistive interfering influence caused by moisture.

Abstract: The invention relates to a method for monitoring the function of a capacitive pressure measuring cell (10) comprising a measuring capacitor (CM) and a reference capacitor (CR) as well as a temperature element, wherein in an evaluation unit the pressure measurement value p is obtained by forming the quotient Q from the capacitance values of the reference capacitor (CR) and the measuring capacitor (CM).

Abstract: The invention relates to a method for monitoring the function of a capacitive pressure measurement cell (10) which has a measuring capacitor (CM) and a reference capacitor (CR), to which an internal excitation voltage UE0 in the form of an alternating square-wave signal is applied.

Abstract: The disclosure relates to a method for operating a capacitive pressure measurement device. In order to achieve an insensitivity to external signal sources, the disclosure proposes continuously varying the working frequency of the pressure measurement device so that a resonance formation with externally injected (interfering) frequencies is avoided.

Abstract: The disclosure relates to a method for monitoring the operation of a pressure measuring cell of a capacitive pressure sensor, wherein the pressure measuring cell comprises a pressure-dependent measuring capacitor and a pressure-dependent reference capacitor and the pressure measuring value is obtained as a measuring signal from the capacitance values of the measuring capacitor and the reference capacitor, wherein the measuring signal is supplied to an evaluation unit in the form of an alternating square-wave signal, the pulse height of the signal depending on quotients of the capacitance values of the reference capacitor and the measuring capacitor and the period of the signal being determined by the capacitance value of the measuring capacitor such that, in the nominal pressure range of the pressure sensor, there is a fixed correlation between the pulse height and the period, wherein the pairs of values of pulse height and period (h1, d1), . . .

Abstract: The disclosure relates to a method for monitoring the operation of a pressure measuring cell of a capacitive pressure sensor, wherein the pressure measuring cell comprises a pressure-dependent measuring capacitor and a pressure-dependent reference capacitor and the pressure measuring value is obtained as a measuring signal from the capacitance values of the measuring capacitor and the reference capacitor, wherein the measuring signal is supplied to an evaluation unit in the form of an alternating square-wave signal, the pulse height of the signal depending on quotients of the capacitance values of the reference capacitor and the measuring capacitor and the period of the signal being determined by the capacitance value of the measuring capacitor such that, in the nominal pressure range of the pressure sensor, there is a fixed correlation between the pulse height and the period, wherein the pairs of values of pulse height and period (h1, d1), . . .

Abstract: The disclosure relates to a method for operating a capacitive pressure measurement device. In order to achieve an insensitivity to external signal sources, the disclosure proposes continuously varying the working frequency of the pressure measurement device so that a resonance formation with externally injected (interfering) frequencies is avoided.