Patents by Inventor Manfred Pilz

Manfred Pilz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical units
    Patent number: 7387395
    Abstract: In a method for producing an optical unit having an optical element deviating from a circular shape, for an optical imaging system, in particular for a projection objective in semiconductor lithography in the EUV region, a supporting part is provided, which is provided with reference surfaces for adjustment in the optical system, in accordance with which the optical element is connected to the supporting part. Subsequently, there is fixed relative to the optical element a zero point which forms a reference point with a zero point fixed in the optical system during installation of the optical unit in the optical system.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: June 17, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Manfred Pilz, Christian Muenster
  • Method for producing an optical unit
    Publication number: 20050134973
    Abstract: In a method for producing an optical unit having an optical element deviating from a circular shape, for an optical imaging system, in particular for a projection objective in semiconductor lithography in the EUV region, a supporting part is provided, which is provided with reference surfaces for adjustment in the optical system, in accordance with which the optical element is connected to the supporting part. Subsequently, there is fixed relative to the optical element a zero point which forms a reference point with a zero point fixed in the optical system during installation of the optical unit in the optical system.
    Type: Application
    Filed: December 17, 2004
    Publication date: June 23, 2005
    Inventors: Manfred Pilz, Christian Muenster