Patents by Inventor Manfred Schreil

Manfred Schreil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement for coating a substrate
    Patent number: 8192548
    Abstract: The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
    Type: Grant
    Filed: October 20, 2005
    Date of Patent: June 5, 2012
    Assignee: Applied Materials GmbH & Co. KG
    Inventors: Uwe Hoffmann, Manfred Schreil, Jose Manuel Dieguez-Campo, Marcus Bender
  • Arrangement for coating a substrate
    Publication number: 20060130765
    Abstract: The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.
    Type: Application
    Filed: October 20, 2005
    Publication date: June 22, 2006
    Inventors: Uwe Hoffmann, Manfred Schreil, Jose Dieguez-Campo, Marcus Bender