Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Abstract: In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.

Abstract: An assembly for fixation or adjusting of an optical element (1) with, regard to an outer mount or support (4) wherein the optical element (1) is alignable with regard to a structure of the optical arrangement, particularly the objective structure or the objective barrel, having an optical axis or with regard to neighbouring mounts by means of an adjusting arrangement, is characterized in that the adjusting arrangement comprises at least an elastic means (9), particularly a spring, an elastic rod or stick, an elastic tape or an elastic gear wheel or an elastic gear box by which a force or a torque is applicable to the optical element (1). The assembly is particularly suitable for use in a microlithographic exposure apparatus. In some embodiments an intermediate ring (27) positioned between the optical element (24) and the outer mount or support (26) is used to reduce deformations.

Abstract: In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.

Abstract: An air damped seating particularly for devices and vehicles comprising a control chamber, an air chamber, both of variable volume, and a damping duct. The control chamber is provided with an air inlet flange and a valve, and is connected to the air chamber by a connection pipe. The damping duct is connected with one end portion to an air outlet opening of the air chamber and is tightly sealed on its other end portion. The length of the duct is defined by its radius, the excitation frequency of the oscillation to be damped, and by the mass to be damped, which is in connection with the chambers.