Abstract: In order to minimize the amount of contaminants that pass through a pump, or that are allowed to accumulate therein, a sub-atmospheric pressure gas scrubber suitable for use upstream of a vacuum pump is provided. The gas scrubber comprising a vessel and means for forming a spray of cleaning solvent within the vessel, the vessel comprising an inlet and an outlet for the gas to be cleaned at sub atmospheric pressure, the inlet and outlet being arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent, the means for forming a spray comprising a cleaning solvent inlet connected to at least one spray nozzle and a cleaning solvent outlet through which used solvent can be pumped from the vessel using a pump, wherein the pump is arranged to recirculate the used solvent back to the cleaning solvent inlet.

Abstract: In order to minimize the amount of contaminants that pass through a pump, or that are allowed to accumulate therein, a sub-atmospheric pressure gas scrubber suitable for use upstream of a vacuum pump is provided. The gas scrubber comprising a vessel and means for forming a spray of cleaning solvent within the vessel, the vessel comprising an inlet and an outlet for the gas to be cleaned at sub atmospheric pressure, the inlet and outlet being arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent, the means for forming a spray comprising a cleaning solvent inlet connected to at least one spray nozzle and a cleaning solvent outlet through which used solvent can be pumped from the vessel using a pump, wherein the pump is arranged to recirculate the used solvent back to the cleaning solvent inlet.