Patents by Inventor Manish Hamkar

Manish Hamkar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for precleaning a substrate prior to metal silicide fabrication process
    Patent number: 8912096
    Abstract: Methods for precleaning native oxides or other contaminants from a surface of a substrate prior to forming a metal silicide layer on the substrate. In one embodiment, a method for removing native oxides from a substrate includes transferring a substrate having an oxide layer disposed thereon into a processing chamber, performing a pretreatment process on the substrate by supplying a pretreatment gas mixture into the processing chamber, performing an oxide removal process on the substrate by supplying a cleaning gas mixture into the processing chamber, wherein the cleaning gas mixture includes at least an ammonium gas and a nitrogen trifluoride, and performing a post treatment process on the cleaned substrate by supplying a post treatment gas mixture into the processing chamber.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: December 16, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Bo Zheng, Arvind Sundarrajan, Manish Hamkar
  • METHODS FOR PRECLEANING A SUBSTRATE PRIOR TO METAL SILICIDE FABRICATION PROCESS
    Publication number: 20120276740
    Abstract: Methods for precleaning native oxides or other contaminants from a surface of a substrate prior to forming a metal silicide layer on the substrate.
    Type: Application
    Filed: April 28, 2011
    Publication date: November 1, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Bo Zheng, Arvind Sundarrajan, Manish Hamkar