Abstract: Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.

Abstract: In certain embodiments, a device is provided that utilizes both interferometrically reflected light and transmitted light. Light incident on the device is interferometrically reflected from a plurality of layers of the device to emit light in a first direction, the interferometrically reflected light having a first color. Light from a light source is transmitted through the plurality of layers of the device to emit from the device in the first direction, the transmitted light having a second color.

Abstract: Anti-stiction systems may include one or more anti-stiction electrodes driven to provide an electrical force that counteracts a stiction force acting upon a moveable portion of an interferometric modulator. The anti-stiction electrode(s) may be disposed on a back glass or on another such substrate. The anti-stiction electrode(s) may be configured to apply an electrical force to substantially all of the interferometric modulators in a display device at once and/or may be configured to apply an electrical force only to a selected area. In some embodiments, the sum of an anti-stiction electrical force and a mechanical restoring force of a moveable part of an interferometric modulator is sufficient to counteract a stiction force.

Abstract: In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.

Abstract: MEMS devices include materials which are used in LCD or OLED fabrication to facilitate fabrication on the same manufacturing systems. Where possible, the same or similar materials are used for multiple layers in the MEMS device, and use of transparent conductors for partially transparent electrodes can be avoided to minimize the number of materials needed and minimize fabrication costs. Certain layers comprise alloys selected to achieve desired properties. Intermediate treatment of deposited layers during the manufacturing process can be used to provide layers having desired properties.

Abstract: A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate includes a curved portion relative to the substrate. The curved portion is substantially throughout the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.

Abstract: A microelectromechanical systems (MEMS) display element may include a photovoltaic structure configured to generate electric energy from incident light. In one embodiment, the display element includes a first layer that is at least partially transmissive of light, a second layer that is at least partially reflective of light, and a photovoltaic element that is formed on the first layer or the second layer or formed between the first layer and the second layer. The second layer is spaced from the first layer and is selectably movable between a first position in which the display element has a first reflectivity and a second position in which the display element has a second reflectivity. The first reflectivity is greater than the second reflectivity. The photovoltaic element is at least partially absorptive of light and is configured to convert a portion of the absorbed light into electric energy, at least when the second layer is in the second position.

Abstract: A bit depth of a pixel comprising multiple display elements, such as interferometric modulators, may be increased through the use of display elements having different intensities, while the lead count is minimally increased. An exemplary pixel with at least one display element having an intensity of 0.5 and N display elements each having an intensity of one can provide about 2N+1 shades (e.g., 0, 0.5, 1.0, 1.5, 2.0, [N+0.5]). In comparison, a pixel having N display elements, each having an intensity of one, can only provide about N+1 shades (e.g., 0, 1, 2, . . . , N). Thus, using at least one display element having an intensity lower than the intensity of each of the other display elements increases the number of shades provided by the pixel by an approximate factor of two and increases the bit depth of the pixel, while minimizing the number of additional leads.

Abstract: A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.

Abstract: Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.

Abstract: Systems and methods, to integrate an optical touch screen with a display device comprising a front illumination system, are disclosed. Disclosed embodiments comprise a front illumination system, a display device further comprising a plurality of light-modulating elements (e.g. interferometric modulators), a plurality of reflectors and a plurality of sensor arrays. Light from the front illumination system not directed towards the display device is reflected by the reflectors towards the sensor arrays.

Abstract: The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.

Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

Abstract: Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.

Abstract: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract: Methods and devices for applying bias potentials of opposite polarities to columns of electromechanical display elements are described herein. The bias potentials may be applied such that a column and an adjacent column receive bias potentials of opposite polarity. The bias potentials may be applied such that a polarity of bias voltages received by columns of a first set of the display elements is opposite a polarity of bias voltages received by columns of a second set of the display elements.

Abstract: A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

Abstract: Certain embodiments of the invention provide a light sensor comprising at least one interferometric element that absorbs light in at least one wavelength. The interferometric element comprises a first surface and a second surface substantially parallel to the first surface. The second surface is spaced a gap distance from the first surface in a direction substantially perpendicular to the first surface. The light wavelength absorbed is dependent on the gap distance. The interferometric element further comprises a temperature sensor. The temperature sensor is responsive to changes in temperature of at least a portion of the interferometric element due to absorption of light by the interferometric element.

Abstract: In certain embodiments, a device is provided that utilizes both interferometrically reflected light and transmitted light. Light incident on the device is interferometrically reflected from a plurality of layers of the device to emit light in a first direction, the interferometrically reflected light having a first color. Light from a light source is transmitted through the plurality of layers of the device to emit from the device in the first direction, the transmitted light having a second color.