Patents by Inventor Manivannan Thothadri

Manivannan Thothadri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10948818
    Abstract: Embodiments of the present disclosure generally relate to imprint lithography, and more particularly to methods and apparatus for creating a large area imprint without a seam. Methods disclosed herein generally include separating the curing time of the features in a stamp or product from the curing time of the seam and the periphery. The seam and periphery can be cured first or the seam and periphery can be cured last. Additionally, the seam curing operations can be performed on the master, on the stamp, or on the final product.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: March 16, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kevin Laughton Cunningham, Manivannan Thothadri
  • Publication number: 20210066036
    Abstract: Aspects of the disclosure relate to apparatus for the fabrication of waveguides. In one example, an angled ion source is utilized to project ions toward a substrate to form a waveguide which includes angled gratings. In another example, an angled electron beam source is utilized to project electrons toward a substrate to form a waveguide which includes angled gratings. Further aspects of the disclosure provide for methods of forming angled gratings on waveguides utilizing an angled ion beam source and an angled electron beam source.
    Type: Application
    Filed: October 26, 2020
    Publication date: March 4, 2021
    Inventors: Ludovic GODET, Rutger MEYER TIMMERMAN THIJSSEN, Kartik RAMASWAMY, Yang YANG, Manivannan THOTHADRI, Chien-An CHEN
  • Publication number: 20200408957
    Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer disposed on the glass layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the adhesion promotion layer and an anti-fingerprint coating layer disposed on the dry hardcoat layer.
    Type: Application
    Filed: June 16, 2020
    Publication date: December 31, 2020
    Inventors: Manivannan THOTHADRI, Harvey YOU, Helinda NOMINANDA, Neil MORRISON, Daniel Paul FORSTER, Arvinder CHADHA
  • Publication number: 20200410208
    Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a substrate, an anti-fingerprint coating layer, and an adhesion promotion layer disposed between the substrate and the anti-fingerprint coating layer.
    Type: Application
    Filed: June 16, 2020
    Publication date: December 31, 2020
    Inventors: Manivannan THOTHADRI, Harvey YOU, Helinda NOMINANDA, Neil MORRISON, Daniel Paul FORSTER, Arvinder CHADHA
  • Publication number: 20200408956
    Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an adhesion promotion layer on the glass layer, an anti-reflectance layer disposed on the adhesion promotion layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the anti-reflectance layer, and an anti-fingerprint coating layer disposed on the dry hardcoat layer.
    Type: Application
    Filed: June 16, 2020
    Publication date: December 31, 2020
    Inventors: Manivannan THOTHADRI, Harvey YOU, Helinda NOMINANDA, Neil MORRISON, Daniel Paul FORSTER, Arvinder CHADHA
  • Publication number: 20200408961
    Abstract: Embodiments described and discussed herein generally relate to flexible or foldable display devices, and more specifically to flexible cover lens assemblies. In one or more embodiments, a flexible cover lens assembly contains a glass layer, an impact absorption layer disposed on the glass layer, a moisture barrier layer disposed on the impact absorption layer, a substrate disposed on the moisture barrier layer, a wet hardcoat layer having a nano-indentation hardness in a range from about 0.4 GPa to about 1.5 GPa and disposed on the substrate, an adhesion promotion layer disposed on the wet hardcoat layer, an anti-reflectance layer disposed on the adhesion promotion layer, a dry hardcoat layer having a nano-indentation hardness in a range from about 1 GPa to about 5 GPa and disposed on the anti-reflectance layer, and an anti-fingerprint coating layer disposed on the dry hardcoat layer.
    Type: Application
    Filed: June 16, 2020
    Publication date: December 31, 2020
    Inventors: Manivannan THOTHADRI, Harvey YOU, Helinda NOMINANDA, Neil MORRISON, Daniel Paul FORSTER, Arvinder CHADHA
  • Patent number: 10859870
    Abstract: Embodiments described herein relate to three dimensional (3D) display apparatus. In one embodiment, the 3D display apparatus include a polychromatic backlight unit comprising an emissive light source, a collimator comprising a plurality of collimating features coupled to and in optical communication with the backlight unit, and a diffractive element comprising a plurality of gratings coupled to and in optical communication with the collimator. In other embodiments, the 3D display apparatus includes a monochromatic backlight unit, an LCD module, and a quantum dot containing film.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: December 8, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Manivannan Thothadri, Arvinder Chadha
  • Patent number: 10818472
    Abstract: Aspects of the disclosure relate to apparatus for the fabrication of waveguides. In one example, an angled ion source is utilized to project ions toward a substrate to form a waveguide which includes angled gratings. In another example, an angled electron beam source is utilized to project electrons toward a substrate to form a waveguide which includes angled gratings. Further aspects of the disclosure provide for methods of forming angled gratings on waveguides utilizing an angled ion beam source and an angled electron beam source.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: October 27, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Ludovic Godet, Rutger Meyer Timmerman Thijssen, Kartik Ramaswamy, Yang Yang, Manivannan Thothadri, Chien-An Chen
  • Publication number: 20200321186
    Abstract: Embodiments described herein relate to apparatus and methods for performing electron beam reactive plasma etching. In one embodiment, an apparatus for performing EBRPE processes includes an electrode formed from a material having a high secondary electron emission coefficient. The electrode has an electron emitting surface disposed at a nonparallel angle relative to a major axis of a substrate assembly. The EBRPE apparatus may further comprise a capacitive or inductive coupled plasma generator. In another embodiment, methods for etching a substrate include generating a plasma and bombarding an electrode with ions from the plasma to cause the electrode to emit electrons. The electrons are accelerated toward a substrate to induce directional etching of the substrate. During the EBPRE process, the substrate or electrode is actuated through a process volume during the etching.
    Type: Application
    Filed: April 2, 2019
    Publication date: October 8, 2020
    Inventors: John M. WHITE, Yang YANG, Kartik RAMASWAMY, Manivannan THOTHADRI, Yue GUO
  • Publication number: 20200203423
    Abstract: An apparatus for positioning micro-devices on a destination substrate includes a first support to hold a destination substrate, a second support to provide or hold a transfer body having a surface to receive an adhesive layer, a light source to generate a light beam, a mirror configured to adjustably position the light beam on the adhesive layer on the transfer body, and a controller. The controller is configured to cause the light source to generate the light beam and adjust the mirror to position the light beam on the adhesive layer so as to selectively expose one or more portions of the adhesive layer to create one or more neutralized portions. The transfer body and the destination substrate are moved away from each other and one or more micro-devices corresponding to the one or more neutralized portions of the adhesive layer remain on the destination substrate.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Inventors: Manivannan Thothadri, Robert Jan Visser
  • Publication number: 20200192027
    Abstract: Aspects of the disclosure relate to apparatus for the fabrication of waveguides. In one example, an angled ion source is utilized to project ions toward a substrate to form a waveguide which includes angled gratings. In another example, an angled electron beam source is utilized to project electrons toward a substrate to form a waveguide which includes angled gratings. Further aspects of the disclosure provide for methods of forming angled gratings on waveguides utilizing an angled ion beam source and an angled electron beam source.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 18, 2020
    Inventors: Kartik RAMASWAMY, Yang YANG, Manivannan THOTHADRI, Chien-An CHEN, Ludovic GODET, Rutger MEYER TIMMERMAN THIJSSEN
  • Publication number: 20200194218
    Abstract: Aspects of the disclosure relate to apparatus for the fabrication of waveguides. In one example, an angled ion source is utilized to project ions toward a substrate to form a waveguide which includes angled gratings. In another example, an angled electron beam source is utilized to project electrons toward a substrate to form a waveguide which includes angled gratings. Further aspects of the disclosure provide for methods of forming angled gratings on waveguides utilizing an angled ion beam source and an angled electron beam source.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 18, 2020
    Inventors: Ludovic GODET, Rutger Meyer Timmerman Thijssen, Kartik Ramaswamy, Yang Yang, Manivannan Thothadri, Chien-An Chen
  • Patent number: 10580826
    Abstract: An apparatus for positioning micro-devices on a destination substrate includes a first support to hold a destination substrate, a second support to provide or hold a transfer body having a surface to receive an adhesive layer, a light source to generate a light beam, a mirror configured to adjustably position the light beam on the adhesive layer on the transfer body, and a controller. The controller is configured to cause the light source to generate the light beam and adjust the mirror to position the light beam on the adhesive layer so as to selectively expose one or more portions of the adhesive layer to create one or more neutralized portions. The transfer body and the destination substrate are moved away from each other and one or more micro-devices corresponding to the one or more neutralized portions of the adhesive layer remain on the destination substrate.
    Type: Grant
    Filed: February 7, 2019
    Date of Patent: March 3, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Manivannan Thothadri, Robert Jan Visser
  • Publication number: 20200057178
    Abstract: Implementations described herein generally relate to a flexible display devices, and more specifically to flexible cover lens films. The flexible cover lens film has improved strength, elasticity, optical transmission, and anti-abrasion properties, and contains a multi-layer hardcoat disposed on a substrate layer. The substrate layer has a thickness of 2 ?m to 100 ?m and the multi-layer hardcoat has a thickness of 1 ?m to 30 ?m. The mufti-layer hardcoat contains a first layer deposited using a wet deposition process, a second layer deposited using a dry deposition process, and one or more adhesion promotion layers. For optical properties, the multi-layer hardcoat has a total transmission greater than 88%, a haze of about 1% or less, and a yellowness index of b*<1. By combining wet and dry deposition processes to form the multi-layer hardcoat, the cover lens film is both flexible and strong with a hardness between 4H and 9H.
    Type: Application
    Filed: July 8, 2019
    Publication date: February 20, 2020
    Applicant: Applied Materials, Inc.
    Inventors: Manivannan THOTHADRI, Harvey YOU, Neil MORRISON, Daniel Paul FORSTER
  • Patent number: 10559730
    Abstract: The present disclosure generally relates to light field displays and methods of displaying images with light field arrays. In one example, the present disclosure relates to pixel arrangements for use in light field displays. Each pixel includes a plurality of LEDs, such as micro LEDs, positioned adjacent respective micro-lenses of each pixel.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: February 11, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser, John M. White
  • Publication number: 20190391448
    Abstract: Embodiments described herein relate to three dimensional (3D) display apparatus. In one embodiment, the 3D display apparatus include a polychromatic backlight unit comprising an emissive light source, a collimator comprising a plurality of collimating features coupled to and in optical communication with the backlight unit, and a diffractive element comprising a plurality of gratings coupled to and in optical communication with the collimator. In other embodiments, the 3D display apparatus includes a monochromatic backlight unit, an LCD module, and a quantum dot containing film.
    Type: Application
    Filed: January 25, 2019
    Publication date: December 26, 2019
    Inventors: Manivannan THOTHADRI, Arvinder CHADHA
  • Patent number: 10490599
    Abstract: Embodiments described herein provide for light field displays and methods of forming light field displays where micro-LED arrays are each configured to provide at least a macro-pixel of effective native hardware resolution, where each macro-pixel provides single pixel of spatial resolution and plurality of pixels of angular resolution, and where each pixel of angular resolution includes a plurality of sub-pixels each provided by a directional collimating micro-LED device described herein.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: November 26, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser, John M. White
  • Publication number: 20190346591
    Abstract: Implementations described herein generally relate to flexible display devices and cover lens assemblies with flexible cover lens. In one or more embodiments, a cover lens assembly is provided and includes a first flexible cover lens, a second flexible cover lens, and a sacrificial adhesion disposed between the first flexible cover lens and the second flexible cover lens. The first flexible cover lens includes a first hard coat layer having a hardness in a range from about 4 H to about 9 H and a first substrate. The second flexible cover lens includes a second hard coat layer having a hardness in a range from about 2 H to about 9 H. The first substrate is disposed between the first hard coat layer and the sacrificial adhesion layer.
    Type: Application
    Filed: May 8, 2019
    Publication date: November 14, 2019
    Inventors: Manivannan THOTHADRI, Ali SALEHPOUR, John D. BUSCH, Robert Jan VISSER
  • Publication number: 20190285981
    Abstract: Embodiments of the present disclosure generally relate to imprint lithography, and more particularly to methods and apparatus for creating a large area imprint without a seam. Methods disclosed herein generally include separating the curing time of the features in a stamp or product from the curing time of the seam and the periphery. The seam and periphery can be cured first or the seam and periphery can be cured last. Additionally, the seam curing operations can be performed on the master, on the stamp, or on the final product.
    Type: Application
    Filed: March 19, 2018
    Publication date: September 19, 2019
    Inventors: Kevin Laughton CUNNINGHAM, Manivannan THOTHADRI
  • Publication number: 20190229246
    Abstract: The present disclosure generally relates to light field displays and methods of displaying images with light field arrays. In one example, the present disclosure relates to pixel arrangements for use in light field displays. Each pixel includes a plurality of LEDs, such as micro LEDs, positioned adjacent respective micro-lenses of each pixel.
    Type: Application
    Filed: March 29, 2019
    Publication date: July 25, 2019
    Inventors: Christopher Dennis BENCHER, Manivannan THOTHADRI, Robert Jan VISSER