Patents by Inventor Manjunath SATYADEVAN

Manjunath SATYADEVAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preventing deposition on pedestal in semiconductor substrate processing
    Patent number: 11725285
    Abstract: A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.
    Type: Grant
    Filed: July 25, 2019
    Date of Patent: August 15, 2023
    Assignee: Lam Research Corporation
    Inventors: Vinayakaraddy Gulabal, Ravi Vellanki, Gary B. Lind, Michael Rumer, Manjunath Satyadevan
  • PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING
    Publication number: 20210230749
    Abstract: A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.
    Type: Application
    Filed: July 25, 2019
    Publication date: July 29, 2021
    Inventors: Vinayakaraddy GULABAL, Ravi VELLANKI, Gary B. LIND, Michael RUMER, Manjunath SATYADEVAN