Abstract: A software system and method is disclosed for creating analytical graphics such as bar charts and the like with greater flexibility in an object-oriented Window® environment. The software is particularly applicable to analyzing production data in semiconductor quality control. The user customizes the analytical tools by selecting production parameters from a dialog box, and creates flowcharts on the computer display representing the sequence of production variables and production functions previously selected. The software is set up with a macro recording function to remember the production keystrokes previously selected. The analytical sequence represented by the flowchart is automatically executed whenever it is selected by the user, or this sequence can be preprogrammed to run at specified intervals in the future.

Abstract: A software system and method is disclosed for extending classification attributes in the analysis of production data. The software operates in an object-oriented Windows® environment with increased flexibility because it permits the user to add classifications by dragging and dropping with a computer mouse. Thus, the system can be changed without reprogramming the software code, and is not limited by preprogrammed classifications. The classifications are preferably cluster classifications of defects in semiconductor processing such as scratches, particles, pinholes and blowouts. When a cluster classification is executed, a production map is filtered to remove the non-defect data according to the selected classification; the defect attribute is then readily visible. The filtered production maps may also be color coded for better visibility so that a plurality of corresponding defects in the map are visible in a plurality of corresponding colors.

Abstract: A software system and method is disclosed for creating analytical graphics such as bar charts and the like with greater flexibility in an object-oriented Window.RTM. environment. The software is particularly applicable to analyzing production data in semiconductor quality control. The user customizes the analytical tools by selecting production parameters from a dialog box, and creates flowcharts on the computer display representing the sequence of production variables and production functions previously selected. The software is set up with a macro recording function to remember the production keystrokes previously selected. The analytical sequence represented by the flowchart is automatically executed whenever it is selected by the user, or this sequence can be preprogrammed to run at specified intervals in the future.